Silicon bolometer and micro variable infrared filter for CO/sub 2/ measurement

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) ◽

10.1109/omems.2000.879664 ◽

2002 ◽

Author(s):

H. Hara ◽

N. Kishi ◽

H. Iwaoka

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