Performance and reliability of a new MEMS electrostatic lateral output motor

1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296) ◽

10.1109/relphy.1999.761610 ◽

2003 ◽

Author(s):

S.T. Patton ◽

W.D. Cowan ◽

J.S. Zabinski

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