A novel accelerometer based on a silicon thermopile

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers ◽

10.1109/sensor.1991.148901 ◽

2002 ◽

Author(s):

R. Hiratsuka ◽

D.C. van Duyn ◽

T. Otaredian ◽

P. de Vries

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