The activation of MeV Si/sup +/ implants in SI-GaAs

Proceedings of the 7th Conference on Semi-insulating III-V Materials, ◽

10.1109/sim.1992.752679 ◽

2005 ◽

Author(s):

Ji Chengzhou ◽

Zhang Yanwen ◽

Li Guohui ◽

Wang Qi ◽

Wang Wenxun

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