Reduction of dislocations in a SIMOX film by controlling the annealing sequence

1991 IEEE International SOI Conference Proceedings ◽

10.1109/soi.1991.162886 ◽

2002 ◽

Author(s):

T. Nakai ◽

H. Shinyashiki ◽

T. Shingyouji ◽

Y. Yamaguchi ◽

T. Nishimura ◽

...

Download Full-text