Effects of channel and source/drain implants on partially-depleted SOI MOSFETs

1996 IEEE International SOI Conference Proceedings ◽

10.1109/soi.1996.552512 ◽

2002 ◽

Author(s):

M. Cao ◽

P. Vande Voorde ◽

C. Diaz ◽

W. Greene

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