GaN High-Electron-Mobility-Transistor on Free-Standing GaN Substrate With Low Contact Resistance and State-of-the-Art ${f}_{{T}}$ x $ {L}_{{G}}$ Value

Author(s):  
Hanghai Du ◽  
Jincheng Zhang ◽  
Hong Zhou ◽  
Zhihong Liu ◽  
Tao Zhang ◽  
...  
1991 ◽  
Vol 131 ◽  
pp. 60-64
Author(s):  
Marian W. Pospieszalski

AbstractA review of the recent developments in the design, construction and performance of cryogenicallycoolable, high-electron-mobility transistor (HEMT, MODFET) amplifiers and their application in compact cryogenic receivers for radio astronomy applications is presented.


2007 ◽  
Vol 17 (01) ◽  
pp. 85-89 ◽  
Author(s):  
Yunju Sun ◽  
Lester F. Eastman

A significant improvement of contact transfer resistance on undoped GaN/AlGaN/AlN (10 Å)/ GaN high electron mobility transistor (HEMT) structure was demonstrated using a Ta/Ti/Al/Mo/Au metallization scheme compared to a Ti/Al/Mo/Au metallization scheme. A contact resistance as low as 0.16 ± 0.03 ohm - mm was achieved by rapid thermal annealing of evaporated Ta (125 Å)/ Ti (150 Å)/ Al (900 Å)/ Mo (400 Å)/ Au (500 Å) metal contact at 700 °C for 1 min followed by 800 °C for 30 sec in a N 2 ambient. An excellent edge acuity was also demonstrated for the annealed Ta/Ti/Al/Mo/Au ohmic contacts.


2019 ◽  
Vol 217 (7) ◽  
pp. 1900694
Author(s):  
Uiho Choi ◽  
Donghyeop Jung ◽  
Kyeongjae Lee ◽  
Taemyung Kwak ◽  
Taehoon Jang ◽  
...  

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