Optical Emission Spectroscopy-Based Tomography for Compact Low-Pressure Microwave Plasma in a Multicusp

Kavita Rathore; Sudeep Bhattacharjee; Dudh Nath Patel; Prabhat Munshi

doi:10.1109/tps.2017.2734963

Optical Emission Spectroscopy-Based Tomography for Compact Low-Pressure Microwave Plasma in a Multicusp

IEEE Transactions on Plasma Science ◽

10.1109/tps.2017.2734963 ◽

2017 ◽

Vol 45 (9) ◽

pp. 2492-2503 ◽

Cited By ~ 1

Author(s):

Kavita Rathore ◽

Sudeep Bhattacharjee ◽

Dudh Nath Patel ◽

Prabhat Munshi

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Microwave Plasma ◽

Optical Emission ◽

Low Pressure

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Microwave plasma chemical vapour deposition of tetramethylsilane: correlations between optical emission spectroscopy and film characteristics

Surface and Coatings Technology ◽

10.1016/s0257-8972(01)01081-7 ◽

2001 ◽

Vol 142-144 ◽

pp. 314-320 ◽

Cited By ~ 40

Author(s):

L. Thomas ◽

L. Maillé ◽

J.M. Badie ◽

M. Ducarroir

Keyword(s):

Chemical Vapour Deposition ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Vapour Deposition ◽

Microwave Plasma ◽

Chemical Vapour ◽

Optical Emission ◽

Plasma Chemical ◽

Plasma Chemical Vapour Deposition ◽

Film Characteristics

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Measurement Of Resonant And Metastable Densities In A Low Pressure, Microwave Driven, Micro Argon Plasma By Optical Emission Spectroscopy

2017 IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2017.8496165 ◽

2017 ◽

Author(s):

Patrick Hermanns ◽

Bastian Hillebrand ◽

Marcel Fiebrandt ◽

Peter Awakowicz

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Argon Plasma ◽

Optical Emission ◽

Low Pressure

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Probing suprathermal electrons by trace rare gases optical emission spectroscopy in low pressure dipolar microwave plasmas excited at the electron cyclotron resonance

Physics of Plasmas ◽

10.1063/1.5045348 ◽

2018 ◽

Vol 25 (9) ◽

pp. 093511 ◽

Cited By ~ 1

Author(s):

S. Boivin ◽

X. Glad ◽

L. Latrasse ◽

A. Sarkissian ◽

L. Stafford

Keyword(s):

Cyclotron Resonance ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Electron Cyclotron Resonance ◽

Optical Emission ◽

Low Pressure ◽

Electron Cyclotron ◽

Rare Gases ◽

Microwave Plasmas ◽

Suprathermal Electrons

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Remote Microwave Plasma Enhanced Chemical Vapour Deposition of Amorphous Carbon : Optical Emission Spectroscopy Characterisation of the Afterglow and Growth Rates

Journal de Physique IV (Proceedings) ◽

10.1051/jphyscol:1995570 ◽

1995 ◽

Vol 05 (C5) ◽

pp. C5-593-C5-600 ◽

Cited By ~ 1

Author(s):

C. Tixier ◽

P. Tristant ◽

J. Desmaison ◽

D. Merle

Keyword(s):

Chemical Vapour Deposition ◽

Amorphous Carbon ◽

Growth Rates ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Vapour Deposition ◽

Microwave Plasma ◽

Chemical Vapour ◽

Optical Emission

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Investigation of Microwave Plasma during Diamond Doping by Phosphorus Using Optical Emission Spectroscopy

physica status solidi (a) ◽

10.1002/pssa.201900234 ◽

2019 ◽

Vol 216 (21) ◽

pp. 1900234

Author(s):

Mikhail Aleksandrovich Lobaev ◽

Dmitry Borisovich Radishev ◽

Alexey Mikhailovich Gorbachev ◽

Anatoly Leontievich Vikharev ◽

Mikhail Nikolaevich Drozdov

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Microwave Plasma ◽

Optical Emission

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A Linear Model for the Interpretation of Optical Emission Spectroscopy Measurements in Low Pressure DC Magnetron Sputtering

Contributions to Plasma Physics ◽

10.1002/ctpp.2150370603 ◽

1997 ◽

Vol 37 (6) ◽

pp. 483-497 ◽

Cited By ~ 3

Author(s):

J. Schulte ◽

G. Sobe ◽

G. Reiss

Keyword(s):

Magnetron Sputtering ◽

Linear Model ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Dc Magnetron Sputtering

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Spatially resolved optical emission spectroscopy of the secondary glow observed during biasing of a microwave plasma

Vacuum ◽

10.1016/s0042-207x(99)00174-8 ◽

2000 ◽

Vol 56 (1) ◽

pp. 15-23 ◽

Cited By ~ 5

Author(s):

Michael D Whitfield ◽

Richard B Jackman ◽

J.S Foord

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Microwave Plasma ◽

Optical Emission ◽

Spatially Resolved

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Measurements of electron density in different low pressure plasmas using the multipole resonance probe, langmuir probe and optical emission spectroscopy

2016 IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2016.7534183 ◽

2016 ◽

Author(s):

Moritz Oberberg ◽

Stefan Ries ◽

Nikita Bibinov ◽

Peter Awakowicz

Keyword(s):

Electron Density ◽

Langmuir Probe ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure

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Characterization of a low-pressure argon plasma using optical emission spectroscopy and a global model

Journal of Applied Physics ◽

10.1063/1.2559790 ◽

2007 ◽

Vol 101 (5) ◽

pp. 053306 ◽

Cited By ~ 24

Author(s):

A. Palmero ◽

E. D. van Hattum ◽

H. Rudolph ◽

F. H. P. M. Habraken

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Argon Plasma ◽

Optical Emission ◽

Low Pressure ◽

Global Model

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Trace rare gases optical emission spectroscopy: Nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas

Physical Review E ◽

10.1103/physreve.60.6016 ◽

1999 ◽

Vol 60 (5) ◽

pp. 6016-6029 ◽

Cited By ~ 101

Author(s):

M. V. Malyshev ◽

V. M. Donnelly

Keyword(s):

Low Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Rare Gases ◽

Low Temperature Plasmas

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