Tunable 3D monolithic glass dielectrophoretic actuator for optomechanics

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) ◽

10.1109/transducers.2017.7994200 ◽

2017 ◽

Author(s):

Tao Yang ◽

Yves Bellouard

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