Efforts to Increase Utilization & Reduce the Subsidy for a Mid-Size Cleanroom Facility

2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM) ◽

10.1109/ugim.2012.6247089 ◽

2012 ◽

Author(s):

Julia Aebersold ◽

Kevin Walsh ◽

Shamus McNamara

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