Proximity effects in low-energy electron-beam lithography
1993 ◽
Vol 11
(6)
◽
pp. 2367
◽
Keyword(s):
2001 ◽
Vol 57-58
◽
pp. 297-302
◽
2002 ◽
Vol 41
(Part 1, No. 6B)
◽
pp. 4157-4162
◽
1993 ◽
Vol 8
(7)
◽
pp. 1490-1492
◽
Keyword(s):
1987 ◽
Vol 26
(Part 2, No. 7)
◽
pp. L1165-L1167
Keyword(s):
2000 ◽
Vol 18
(6)
◽
pp. 3122
◽
Keyword(s):
2006 ◽
Vol 83
(4-9)
◽
pp. 788-791
◽
Keyword(s):
2004 ◽
Vol 22
(6)
◽
pp. 3518
◽
Keyword(s):