Proximity effects in low-energy electron-beam lithography

Author(s):  
T. J. Stark
2002 ◽  
Vol 41 (Part 1, No. 6B) ◽  
pp. 4157-4162 ◽  
Author(s):  
Tetsuro Nakasugi ◽  
Atsushi Ando ◽  
Ryoichi Inanami ◽  
Noriaki Sasaki ◽  
Kazuyoshi Sugihara ◽  
...  

1987 ◽  
Vol 26 (Part 2, No. 7) ◽  
pp. L1165-L1167
Author(s):  
Akio Sugita ◽  
Masami Kakuchi ◽  
Toshiaki Tamamura

Author(s):  
K. M. Satyalakshmi ◽  
A. Olkhovets ◽  
M. G. Metzler ◽  
C. K. Harnett ◽  
D. M. Tanenbaum ◽  
...  

2001 ◽  
Author(s):  
Tetsuro Nakasugi ◽  
Atsushi Ando ◽  
Kazuyoshi Sugihara ◽  
Motosuke Miyoshi ◽  
Katsuya Okumura

2006 ◽  
Vol 83 (4-9) ◽  
pp. 788-791 ◽  
Author(s):  
Haifang Yang ◽  
Aizi Jin ◽  
Qiang Luo ◽  
Changzhi Gu ◽  
Zheng Cui ◽  
...  

Author(s):  
Masaki Yoshizawa ◽  
Shigeru Moriya ◽  
Kumiko Oguni ◽  
Hiroyuki Nakano ◽  
Shinji Omori ◽  
...  

1982 ◽  
Author(s):  
K. J. Polasko ◽  
Y. W. Yau ◽  
R. F. W. Pease

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