Surface characterization of ultrathin atomic layer deposited molybdenum oxide films using high-sensitivity low-energy ion scattering
2021 ◽
Vol 39
(6)
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pp. 063210
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2007 ◽
Vol 14
(01)
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pp. 31-41
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1986 ◽
Vol 100
(2)
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pp. 500-502
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