Surface characterization of ultrathin atomic layer deposited molybdenum oxide films using high-sensitivity low-energy ion scattering

2021 ◽  
Vol 39 (6) ◽  
pp. 063210
Author(s):  
Raivathari M. Singhania ◽  
Henry Price ◽  
Vaneck Y. Kounga ◽  
Benjamin Davis ◽  
Philipp Brüner ◽  
...  
2011 ◽  
Vol 19 (2) ◽  
pp. 34-38 ◽  
Author(s):  
T. Grehl ◽  
E. Niehuis ◽  
H. H. Brongersma

Low-energy ion scattering (LEIS) has gained new capabilities and now provides high-end instrumentation for real-world surface analytical applications. Although the technique has been available for some decades, recent developments in instrumentation make the unique capabilities of LEIS accessible for everyday applications. Special ion energy analyzer designs allow LEIS to be used for non-destructive quantitative analysis of the elemental composition of the outermost atomic layer with high sensitivity and high mass resolution. At the same time, the composition of the first 10 nm of sub-surface material is also assessed. Applications are very broad, ranging from catalysts to various thin films to polymers.


2021 ◽  
Vol 28 (1) ◽  
pp. 014201
Author(s):  
Tahereh G. Avval ◽  
Stanislav Průša ◽  
Sean C. Chapman ◽  
Matthew R. Linford ◽  
Tomáš Šikola ◽  
...  

2007 ◽  
Vol 14 (01) ◽  
pp. 31-41 ◽  
Author(s):  
FERIDOUN SAMAVAT ◽  
BRUCE V. KING ◽  
D. JOHN O'CONNOR

Low energy ion scattering (LEIS) is the study of the composition and structure of a surface by the detection of low energy ions with energies ranging from 100 eV to 10 keV elastically scattered off the surface. The extreme sensitivity to the outermost atomic layer makes it as a unique tool for surface analysis. In this paper, concepts of shadowing, blocking, and also polar and azimuthal scans have been described. Surface order and surface atom spacings are revealed by using these concepts and measuring the intensity of backscattered projectiles as a function of the incident and azimuthal angles.


2014 ◽  
Vol 5 (11) ◽  
pp. 4404-4418 ◽  
Author(s):  
Ignacio J. Villar-Garcia ◽  
Sarah Fearn ◽  
Gilbert F. De Gregorio ◽  
Nur L. Ismail ◽  
Florence J. V. Gschwend ◽  
...  

We have identified elements present in the ionic liquid–vacuum outer atomic surface of 23 ionic liquids using high sensitivity low-energy ion scattering (LEIS), a very surface sensitive technique.


2019 ◽  
Vol 26 (2) ◽  
pp. 024201 ◽  
Author(s):  
Tahereh G. Avval ◽  
Cody V. Cushman ◽  
Philipp Brüner ◽  
Thomas Grehl ◽  
Hidde H. Brongersma ◽  
...  

2009 ◽  
Vol 140 (3-4) ◽  
pp. 197-201 ◽  
Author(s):  
H.R.J. ter Veen ◽  
T. Kim ◽  
I.E. Wachs ◽  
H.H. Brongersma

Langmuir ◽  
2013 ◽  
Vol 29 (46) ◽  
pp. 14301-14306 ◽  
Author(s):  
Alan Kauling ◽  
Günter Ebeling ◽  
Jonder Morais ◽  
Agílio Pádua ◽  
Thomas Grehl ◽  
...  

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