Reaction mechanism studies on atomic layer deposition process of AlF3
2022 ◽
Vol 40
(2)
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pp. 022401
2013 ◽
Vol 117
(27)
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pp. 14241-14246
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2002 ◽
Vol 12
(5)
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pp. 1484-1489
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2002 ◽
Vol 8
(1)
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pp. 21
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2014 ◽
Vol 78
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pp. 1243-1253
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2020 ◽
Vol 38
(2)
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pp. 022418
2011 ◽
Vol 171
(1)
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pp. 345-349
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