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Fourier analysis determination of best focus in submicron lithography
Mapping Intimacies
◽
10.1117/12.174134
◽
1994
◽
Author(s):
S. Jeffrey Rosner
◽
Nader Shamma
◽
Frederik Sporon-Fiedler
Keyword(s):
Fourier Analysis
◽
Analysis Determination
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