XeCl excimer laser with high repetition rate and low divergence beam

1996 ◽  
Author(s):  
Yingzi Nan
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser

5 kHz high repetition rate and high power XeCl excimer laser

1995 ◽  
Vol 66 (11) ◽  
pp. 5162-5164 ◽  
Author(s):  
Tatsumi Goto ◽  
Koji Kakizaki ◽  
Shigeyuki Takagi ◽  
Noboru Okamoto ◽  
Saburo Sato ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser

Double-Pulse Operation in XeCl Excimer Laser for Simulation of High-Repetition-Rate Performance

1990 ◽  
Vol 29 (Part 1, No. 6) ◽  
pp. 1108-1111 ◽  
Author(s):  
Shigeyuki Takagi ◽  
Noboru Okamoto ◽  
Saburo Sato ◽  
Tatsumi Goto
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Double Pulse ◽  
Rate Performance ◽  
Pulse Operation ◽  
High Repetition ◽  
Xecl Excimer Laser

scholarly journals An evaluation of hybrid type ceramic bearings used over 5, 000 hours for a high repetition rate XeCl excimer laser

1998 ◽  
Vol 118 (10) ◽  
pp. 1114-1119
Author(s):  
Saburoh Satoh ◽  
Chobei Yamabe ◽  
Kazuhisa Kitamura ◽  
Syouji Kuradome ◽  
Shinichiro Kosugi ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Hybrid Type ◽  
Xecl Excimer Laser

2.5 kHz high repetition rate XeCl excimer laser

1990 ◽  
Vol 68 (11) ◽  
pp. 5927-5929 ◽  
Author(s):  
S. Takagi ◽  
N. Okamoto ◽  
K. Kakizaki ◽  
S. Sato ◽  
T. Goto
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser

2.5 kHz high-repetition-rate XeCl excimer laser

1991 ◽  
Author(s):  
Ken Ishikawa ◽  
S. Takagi ◽  
Naomichi Okamoto ◽  
K. Kakizaki ◽  
Saburoh Satoh ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser

High-repetition-rate XeC1 Excimer Laser

1994 ◽  
pp. 199-202
Author(s):  
Saburoh Satoh ◽  
Noboru Okamoto ◽  
Kohji Kakizaki ◽  
Shigeyuki Takagi ◽  
Ken Ishikawa ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition

High-repetition-rate ArF excimer laser for microlithography

2000 ◽  
Author(s):  
Osamu Wakabayashi ◽  
Tatsuo Enami ◽  
Ken Ishii ◽  
Katsutomo Terashima ◽  
Yasuo Itakura ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Arf Excimer Laser
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