Direct-write electron-beam lithography for submicron integrated circuit fabrication
1989 ◽
Vol 7
(6)
◽
pp. 1426
1992 ◽
Vol 10
(6)
◽
pp. 2936
◽
1991 ◽
Vol 9
(6)
◽
pp. 3132
◽
Keyword(s):
Resist Design Considerations for Direct Write and Projection Electron-Beam Lithography Technologies.
1996 ◽
Vol 9
(4)
◽
pp. 663-675
◽