Ion sputter deposition of shape memory alloy films for microactuators

1997 ◽  
Author(s):  
Sam T. Davies ◽  
Kazuyoshi Tsuchiya
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Sputter Deposition ◽  
Alloy Films

Simulation on Uniaxial-Tension Behavior of NiTi Shape Memory Alloy Films

2009 ◽  
Vol 79-82 ◽  
pp. 1209-1212
Author(s):  
Shuang Shuang Sun ◽  
Jing Dong
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Uniaxial Tension ◽  
Theoretical Foundation ◽  
Quantitative Description ◽  
Experimental Results ◽  
Niti Shape Memory Alloy ◽  
Alloy Films ◽  
Actuation Mechanism ◽  
Micro Actuators

Based on experimental results reported in the reference, Liang-Rogers’ constitutive model for SMA is used to simulate the stress-strain curves of NiTi shape memory alloy films under uniaxial tension with isothermal conditions. The effects of film compositions and temperature on the tensile behavior of NiTi shape memory alloy films are discussed. By comparing the simulation results with the experimental results, it is found that the simulation curves agree basically with the experimental curves except that the phase-transformation regions are wider in the simulation curves. This demonstrates that the Liang-Rogers’ model can be used to predict the thermomechanical behavior of shape memory alloy films roughly. This study provides some theoretical foundation for the quantitative description and prediction of the actuation mechanism when shape memory alloy films are used as micro-actuators.

A surface cleaning method for sputter deposition of pure titanium film onto TiNi shape memory alloy substrate

Vacuum ◽  
2001 ◽  
Vol 60 (1-2) ◽  
pp. 197-199 ◽  
Author(s):  
T Sonoda ◽  
A Watazu ◽  
J Zhu ◽  
A Kamiya ◽  
K Ushiki ◽  
...  
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Pure Titanium ◽  
Surface Cleaning ◽  
Sputter Deposition ◽  
Titanium Film ◽  
Cleaning Method ◽  
Alloy Substrate

Thermomechanical behavior of Ti–Ni shape memory alloy films deposited by DC magnetron sputtering

Vacuum ◽  
2006 ◽  
Vol 80 (7) ◽  
pp. 726-731 ◽  
Author(s):  
Takahiro Namazu ◽  
Shozo Inoue ◽  
Akinobu Hashizume ◽  
Keiji Koterazawa
Keyword(s):  
Shape Memory Alloy ◽  
Magnetron Sputtering ◽  
Shape Memory ◽  
Thermomechanical Behavior ◽  
Dc Magnetron Sputtering ◽  
Alloy Films

scholarly journals Patterned Shape Memory Alloy Films

2002 ◽  
Vol 43 (5) ◽  
pp. 951-955 ◽  
Author(s):  
Kiyotaka Mori ◽  
Jian Li ◽  
Alexander L. Roytburd ◽  
Manfred Wuttig
Keyword(s):  
Shape Memory Alloy ◽  
Shape Memory ◽  
Alloy Films
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