Layer-by-Layer Analysis of the Thickness Distribution of Silicon Dioxide in the Structure SiO2/Si(111) by Inelastic Electron Scattering Cross-Section Spectroscopy

2016 ◽  
Vol 50 (3) ◽  
pp. 339-344
Author(s):  
A. S. Parshin ◽  
S. A. Kushchenkov ◽  
O. P. Pchelyakov ◽  
Yu. L. Mikhlin
Keyword(s):  
Silicon Dioxide ◽  
Cross Section ◽  
Electron Scattering ◽  
Thickness Distribution ◽  
Scattering Cross Section ◽  
Inelastic Electron ◽  
Layer By Layer ◽  
Scattering Cross ◽  
Inelastic Electron Scattering ◽  
Layer Analysis

scholarly journals Factor analysis of inelastic electron scattering cross section spectra of FeSi2

2019 ◽  
Vol 467 ◽  
pp. 012010
Author(s):  
A. Yu. Igumenov ◽  
A. S. Parshin ◽  
V. O. Kanzychakova ◽  
A. M. Demin ◽  
T. A. Andryushchenko ◽  
...  
Keyword(s):  
Factor Analysis ◽  
Cross Section ◽  
Electron Scattering ◽  
Scattering Cross Section ◽  
Inelastic Electron ◽  
Scattering Cross ◽  
Inelastic Electron Scattering

On the fine structure of spectra of the inelastic-electron-scattering cross section and the Si surface parameter

2015 ◽  
Vol 49 (4) ◽  
pp. 423-427 ◽  
Author(s):  
A. S. Parshin ◽  
A. Yu. Igumenov ◽  
Yu. L. Mikhlin ◽  
O. P. Pchelyakov ◽  
A. I. Nikiforov ◽  
...  
Keyword(s):  
Fine Structure ◽  
Cross Section ◽  
Electron Scattering ◽  
Scattering Cross Section ◽  
Inelastic Electron ◽  
Surface Parameter ◽  
Scattering Cross ◽  
Inelastic Electron Scattering

Inelastic electron scattering cross-section spectroscopy of Ge x Si1 − x nanoheterostructures

2014 ◽  
Vol 48 (2) ◽  
pp. 224-227 ◽  
Author(s):  
A. S. Parshin ◽  
E. P. P’yanovskaya ◽  
O. P. Pchelyakov ◽  
Yu. L. Mikhlin ◽  
A. I. Nikiforov ◽  
...  
Keyword(s):  
Cross Section ◽  
Electron Scattering ◽  
Scattering Cross Section ◽  
Inelastic Electron ◽  
Scattering Cross ◽  
Inelastic Electron Scattering
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