NANOSTRUCTURE OF NITROGEN-IMPLANTED SILICON ANNEALED AT ENHANCED PRESSURE

Physics, Chemistry and Application of Nanostructures ◽

10.1142/9789814280365_0061 ◽

2009 ◽

Author(s):

J. BAK-MISIUK ◽

P. ROMANOWSKI ◽

P. FORMANEK ◽

A. MISIUK ◽

M. PRUJSZCZYK ◽

...

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