Behavior of Electrons and Negative Ions in a Capacitively-Coupled Radio-Frequency NF3/Ar Plasma

Toshiyasu Hayashi; Akihiro Kono; Toshio Goto

doi:10.1143/jjap.36.4651

Behavior of Electrons and Negative Ions in a Capacitively-Coupled Radio-Frequency NF3/Ar Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.4651 ◽

1997 ◽

Vol 36 (Part 1, No. 7B) ◽

pp. 4651-4655 ◽

Cited By ~ 8

Author(s):

Toshiyasu Hayashi ◽

Akihiro Kono ◽

Toshio Goto

Keyword(s):

Radio Frequency ◽

Negative Ions ◽

Capacitively Coupled ◽

Ar Plasma

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Synergy Effect of Particle Radiation and Ultraviolet Radiation from Capacitively Coupled Radio Frequency Argon Plasmas on n-GaN Etching Damage

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.6863 ◽

2008 ◽

Vol 47 (8) ◽

pp. 6863-6866 ◽

Cited By ~ 24

Author(s):

Retsuo Kawakami ◽

Takeshi Inaoka ◽

Kikuo Tominaga ◽

Akinobu Kuwahara ◽

Takashi Mukai

Keyword(s):

Ultraviolet Radiation ◽

Radio Frequency ◽

Synergy Effect ◽

Particle Radiation ◽

Capacitively Coupled ◽

Argon Plasmas ◽

Gan Etching

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Electron heating in radio-frequency capacitively coupled atmospheric-pressure plasmas

Applied Physics Letters ◽

10.1063/1.3058686 ◽

2008 ◽

Vol 93 (26) ◽

pp. 261503 ◽

Cited By ~ 68

Author(s):

D. W. Liu ◽

F. Iza ◽

M. G. Kong

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Electron Heating ◽

Capacitively Coupled ◽

Atmospheric Pressure Plasmas

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Influence of finite geometrical asymmetry of the electrodes in capacitively coupled radio frequency plasma

Physics of Plasmas ◽

10.1063/1.4893148 ◽

2014 ◽

Vol 21 (8) ◽

pp. 083509 ◽

Cited By ~ 15

Author(s):

B. Bora ◽

L. Soto

Keyword(s):

Radio Frequency ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

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Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/40/22/022 ◽

2007 ◽

Vol 40 (22) ◽

pp. 7008-7018 ◽

Cited By ~ 92

Author(s):

J Schulze ◽

T Gans ◽

D O'Connell ◽

U Czarnetzki ◽

A R Ellingboe ◽

...

Keyword(s):

Radio Frequency ◽

Dual Frequency ◽

Plasma Parameters ◽

Capacitively Coupled ◽

Radio Frequency Discharge

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Atmospheric pressure, radio frequency, parallel plate capacitively coupled plasma—excitation temperatures and analytical figures of merit

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/s0584-8547(97)00080-3 ◽

1997 ◽

Vol 52 (13) ◽

pp. 1983-1993 ◽

Cited By ~ 12

Author(s):

M.M. Rahman ◽

M.W. Blades

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Parallel Plate ◽

Capacitively Coupled ◽

Figures Of Merit ◽

Plasma Excitation ◽

Capacitively Coupled Plasma ◽

Analytical Figures Of Merit

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Hydro-carbon material design in a capacitively coupled radio-frequency discharge

Plasma Processes and Polymers ◽

10.1002/ppap.201700152 ◽

2017 ◽

Vol 15 (3) ◽

pp. 1700152 ◽

Cited By ~ 1

Author(s):

Slobodan Mitic ◽

Stéphane Coussan ◽

Céline Martin ◽

Lénaïc Couëdel

Keyword(s):

Radio Frequency ◽

Carbon Material ◽

Material Design ◽

Capacitively Coupled ◽

Hydro Carbon ◽

Radio Frequency Discharge

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Observations of Electron Energy Distribution Functions and Ion Bombardment Secondary Electrons in a Capacitively Coupled Radio Frequency Plasma

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms1990.119.6_866 ◽

1999 ◽

Vol 119 (6) ◽

pp. 866-871 ◽

Cited By ~ 1

Author(s):

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Distribution Functions ◽

Radio Frequency Plasma ◽

Electron Energy Distribution ◽

Secondary Electrons ◽

Capacitively Coupled ◽

Frequency Plasma ◽

Energy Distribution Functions

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The role of electron induced secondary electron emission from SiO2surfaces in capacitively coupled radio frequency plasmas operated at low pressures

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aa963d ◽

2017 ◽

Vol 26 (12) ◽

pp. 124001 ◽

Cited By ~ 23

Author(s):

B Horváth ◽

M Daksha ◽

I Korolov ◽

A Derzsi ◽

J Schulze

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Capacitively Coupled ◽

Low Pressures

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Two-dimensional fluid modelling of charged particle transport in radio-frequency capacitively coupled discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/11/4/312 ◽

2002 ◽

Vol 11 (4) ◽

pp. 448-465 ◽

Cited By ~ 71

Author(s):

A Salabas ◽

G Gousset ◽

L L Alves

Keyword(s):

Charged Particle ◽

Radio Frequency ◽

Particle Transport ◽

Two Dimensional ◽

Capacitively Coupled ◽

Charged Particle Transport

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Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

Plasma Sources Science and Technology ◽

10.1088/1361-6595/ab5f27 ◽

2020 ◽

Vol 29 (2) ◽

pp. 025019 ◽

Cited By ~ 2

Author(s):

Máté Vass ◽

Sebastian Wilczek ◽

Trevor Lafleur ◽

Ralf Peter Brinkmann ◽

Zoltán Donkó ◽

...

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Power Absorption ◽

Capacitively Coupled

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