scholarly journals The Use of Artificial Intelligence-Based Optical Remote Sensing and Positioning Technology in Microelectronic Processing Technology

2021 ◽  
Vol 2021 ◽  
pp. 1-10
Author(s):  
Chenqi Yan ◽  
Mengchao Tan

The purpose is to make defect detection in microelectronic processing technology fast, accurate, reliable, and efficient. A new optical remote sensing-optical beam induced resistance change (ORS-OBIRCH) target recognition and location defect detection method is proposed based on an artificial intelligence algorithm, optical remote sensing (ORS), and optical beam induced resistance change (OBIRCH) location technology using deep convolutional neural network. This method integrates the characteristics of high resolution and rich details of the image obtained by ORS technology and combines the advantages of photosensitive temperature characteristics in OBIRCH positioning technology. It can be adopted to identify, capture, and locate the defects of microdevices in the process of microelectronic processing. Simulation results show that this method can quickly reduce the detection range and locate defects accurately and efficiently. The experimental results reveal that the ORS-OBIRCH target recognition defect location detection method can complete the dynamic synchronization of the IC detection system and obtain high-quality images by changing the laser beam irradiation cycle. Moreover, it can analyze and process the detection results to quickly, accurately, and efficiently locate the defect location. Unlike the traditional detection methods, the success rate of detection has been greatly improved, which is about 95.8%, an increase of nearly 40%; the detection time has been reduced by more than half, from 5.5 days to 1.9 days, and the improvement rate has reached more than 65%. In a word, this method has good practical application value in the field of microelectronic processing.

2020 ◽  
Vol 12 (1) ◽  
pp. 152 ◽  
Author(s):  
Ting Nie ◽  
Xiyu Han ◽  
Bin He ◽  
Xiansheng Li ◽  
Hongxing Liu ◽  
...  

Ship detection in panchromatic optical remote sensing images is faced with two major challenges, locating candidate regions from complex backgrounds quickly and describing ships effectively to reduce false alarms. Here, a practical method was proposed to solve these issues. Firstly, we constructed a novel visual saliency detection method based on a hyper-complex Fourier transform of a quaternion to locate regions of interest (ROIs), which can improve the accuracy of the subsequent discrimination process for panchromatic images, compared with the phase spectrum quaternary Fourier transform (PQFT) method. In addition, the Gaussian filtering of different scales was performed on the transformed result to synthesize the best saliency map. An adaptive method based on GrabCut was then used for binary segmentation to extract candidate positions. With respect to the discrimination stage, a rotation-invariant modified local binary pattern (LBP) description was achieved by combining shape, texture, and moment invariant features to describe the ship targets more powerfully. Finally, the false alarms were eliminated through SVM training. The experimental results on panchromatic optical remote sensing images demonstrated that the presented saliency model under various indicators is superior, and the proposed ship detection method is accurate and fast with high robustness, based on detailed comparisons to existing efforts.


2017 ◽  
Vol 9 (3) ◽  
pp. 280 ◽  
Author(s):  
Fang Xu ◽  
Jinghong Liu ◽  
Mingchao Sun ◽  
Dongdong Zeng ◽  
Xuan Wang

2019 ◽  
Vol 11 (18) ◽  
pp. 2173 ◽  
Author(s):  
Jinlei Ma ◽  
Zhiqiang Zhou ◽  
Bo Wang ◽  
Hua Zong ◽  
Fei Wu

To accurately detect ships of arbitrary orientation in optical remote sensing images, we propose a two-stage CNN-based ship-detection method based on the ship center and orientation prediction. Center region prediction network and ship orientation classification network are constructed to generate rotated region proposals, and then we can predict rotated bounding boxes from rotated region proposals to locate arbitrary-oriented ships more accurately. The two networks share the same deconvolutional layers to perform semantic segmentation for the prediction of center regions and orientations of ships, respectively. They can provide the potential center points of the ships helping to determine the more confident locations of the region proposals, as well as the ship orientation information, which is beneficial to the more reliable predetermination of rotated region proposals. Classification and regression are then performed for the final ship localization. Compared with other typical object detection methods for natural images and ship-detection methods, our method can more accurately detect multiple ships in the high-resolution remote sensing image, irrespective of the ship orientations and a situation in which the ships are docked very closely. Experiments have demonstrated the promising improvement of ship-detection performance.


Author(s):  
J. Li ◽  
Z. Wu ◽  
Z. Hu ◽  
Y. Zhang ◽  
M. Molinier

Abstract. Clouds in optical remote sensing images seriously affect the visibility of background pixels and greatly reduce the availability of images. It is necessary to detect clouds before processing images. In this paper, a novel cloud detection method based on attentive generative adversarial network (Auto-GAN) is proposed for cloud detection. Our main idea is to inject visual attention into the domain transformation to detect clouds automatically. First, we use a discriminator (D) to distinguish between cloudy and cloud free images. Then, a segmentation network is used to detect the difference between cloudy and cloud-free images (i.e. clouds). Last, a generator (G) is used to fill in the different regions in cloud image in order to confuse the discriminator. Auto-GAN only requires images and their labels (1 for a cloud-free image, 0 for a cloudy image) in the training phase which is more time-saving to acquire than existing methods based on CNNs that require pixel-level labels. Auto-GAN is applied to cloud detection in Sentinel-2A Level 1C imagery. The results indicate that Auto-GAN method performs well in cloud detection over different land surfaces.


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