Ion Beam Characteristics of Liquid Metal (Gallium) Ion Source with Inclusion of Suppressor

2015 ◽  
Vol 7 (12) ◽  
pp. 945-949
Author(s):  
Boo Ki Min ◽  
Ju Sung Kim ◽  
Seung Ju Lim ◽  
Hyun OH Joo ◽  
Sang Jung Ahn ◽  
...  
Keyword(s):  
Liquid Metal ◽  
Ion Beam ◽  
Ion Source ◽  
Beam Characteristics

High-Power Ion Beam Characteristics of a Magnetic Multi-Pole Line-Cusp Ion Source for the HL-2A Tokomak

2009 ◽  
Vol 26 (8) ◽  
pp. 082901 ◽  
Author(s):  
Zou Gui-Qing ◽  
Lei Guang-Jiu ◽  
Jiang Shao-Feng ◽  
Cao Jian-Yong ◽  
Yu Li-Ming ◽  
...  
Keyword(s):  
High Power ◽  
Ion Beam ◽  
Ion Source ◽  
Beam Characteristics

A Compact Nuclear Microprobe With a Liquid Metal Ion Source and a Toroidal Analyzer

1992 ◽  
Vol 295 ◽  
Author(s):  
Mikio Takai ◽  
Ryou Mimura ◽  
Hiroshi Sawaragi ◽  
Ryuso Aihara
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
High Vacuum ◽  
Spot Size ◽  
Ion Source ◽  
Ultra High Vacuum ◽  
Atomic Resolution ◽  
Nuclear Microprobe

AbstractA nondestructive three-dimensional RBS/channeling analysis system with an atomic resolution has been designed and is being constructed in Osaka University for analysis of nanostructured surfaces and interfaces. An ultra high-vacuum sample-chamber with a threeaxis goniometer and a toroidal electrostatic analyzer for medium energy ion scattering (MEIS) was combined with a short acceleration column for a focused ion beam. A liquid metal ion source (LMIS) for light metal ions such as Li+ or Be+ was mounted on the short column.A minimum beam spot-size of about 10 nm with a current of 10 pA is estimated by optical property calculation for 200 keV Li+ LMIS. An energy resolution of 4 × 10-3 (AE/E) for the toroidal analyzer gives rise to atomic resolution in RBS spectra for Si and GaAs. This system seems feasible for atomic level analysis of localized crystalline/disorder structures and surfaces.

Focussed Ion Beams from Liquid Metal Ion Sources Theory and Applications

1985 ◽  
Vol 45 ◽  
Author(s):  
David R Kingham ◽  
Vincent J Mifsud
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Ion Beam ◽  
Ion Beams ◽  
Ion Source ◽  
Physical Reason ◽  
Probe Size ◽  
Focussed Ion Beam ◽  
Source Current ◽  
Manufacturing Techniques

ABSTRACTA theoretical model of liquid metal ion source (LMIS) operation has been developed by Kingham and Swanson. In this paper we consider beams from LMIS on the basis of this model. In particular we consider properties such as angular intensity, energy spread and relative abundance of differently charged species of the ion beam, and the dependence of these properties on source current and elemental composition. The conclusion is that the brightest focussed beam for a given probe size is attainable at the lowest possible source current as previously stated by Swanson. LMIS sources have an onset current of typically 1-2[A and will not operate stably below this current, thus limiting the maximum focussed ion beam brightness. The physical reason for this is discussed. The relevance of these properties to fine focussed ion beam applications, particularly semiconductor processing, is discussed. Useful, and in some cases unique, device manufacturing techniques can be postulated using one or more of the momentum, energy or atomic addition properties inherant tothis type of system. Advanced research tools are discussed, together with some examples of the use of microfocussed ion beams with probe sizes down to less than 50nm. Immediate applications include: high resolution ion imaging and SIMS microanalysis; ion beam machining and microfabrication; ion beam resist exposure and ion beam mask repair.

Plasma and Ion Beam Characteristics of the Dynamag Ion Source

1962 ◽  
Vol 33 (12) ◽  
pp. 1338-1339 ◽  
Author(s):  
Edwin M. Kellogg ◽  
Karl E. Eklund
Keyword(s):  
Ion Beam ◽  
Ion Source ◽  
Beam Characteristics

Long-life bismuth liquid metal ion source for focussed ion beam micromachining application

2008 ◽  
Vol 254 (22) ◽  
pp. 7401-7404 ◽  
Author(s):  
P. Mazarov ◽  
A. Melnikov ◽  
R. Wernhardt ◽  
A.D. Wieck
Keyword(s):  
Liquid Metal ◽  
Metal Ion ◽  
Ion Beam ◽  
Ion Source ◽  
Focussed Ion Beam ◽  
Long Life
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