155 Precision measurement of error motions of an ultra-precision machine tool

2009 ◽  
Vol 2009.44 (0) ◽  
pp. 108-109
Author(s):  
JungChul LEE ◽  
YongJin NHO ◽  
Yoshikazu ARAI ◽  
Wei GAO
Keyword(s):  
Machine Tool ◽  
Precision Measurement ◽  
Precision Machine ◽  
Ultra Precision

scholarly journals Dynamic Accuracy Design Method of Ultra-precision Machine Tool

2018 ◽  
Vol 31 (1) ◽  
Author(s):  
Guo-Da Chen ◽  
Ya-Zhou Sun ◽  
Fei-Hu Zhang ◽  
Li-Hua Lu ◽  
Wan-Qun Chen ◽  
...  
Keyword(s):  
Machine Tool ◽  
Design Method ◽  
Dynamic Accuracy ◽  
Precision Machine ◽  
Ultra Precision

On-Machine Metrology System Using Confocal Chromatic Probe and Motion Error Correction for Ultra-Precision Machine Tool

2020 ◽  
Author(s):  
Hao Duan ◽  
Shinya Morita ◽  
Takuya Hosobata ◽  
Masahiro Takeda ◽  
Yutaka Yamagata
Keyword(s):  
Machine Tool ◽  
Free Form ◽  
Reference Curve ◽  
Optical Surface ◽  
Motion Error ◽  
Precision Machine ◽  
Ultra Precision ◽  
Axis Position ◽  
Form Deviation ◽  
Accuracy And Repeatability

Abstract Aspherical or free-form optical surface machining using an ultra-precision machine tool is a common and effective method in precision optics manufacturing. However, this method sometimes causes waviness due to the machine’s motion in mid-spatial frequency (MSF) form deviations. This waviness lowers the quality of the optical surface. To address this problem, we use the waviness of the axial displacement of the ultra-precision machine tool. The waviness is obtained by a non-contact on-machine metrology (OMM) system that measures an optical flat as a correction reference curve, which is used to correct the surface of the workpiece to reduce the effect of waviness in advance. The OMM system consists of a displacement probe and a machine tool axis position capture device. The probe system uses a confocal chromatic probe on an ultra-precision machine tool to evaluate the form deviation of the workpiece with 1 nm resolution. The axis position capture system uses a signal branch circuit of linear scale on each axis from the ultra-precision machine tool. The OMM system is tested in terms of accuracy and repeatability. In comparison to the results of the shaper cutting of an oxygen-free copper (OFC) workpiece with feed-forward correction, we were able to reduce the profile error from 125.3 nm to 42.1 nm in p-v (peak to valley) and eventually also reduced the waviness.

Quadrant Protrusion Measurement of Ultra-Precision Machine Tool by Real-Time Position Capturing Method

2016 ◽  
Vol 874 ◽  
pp. 531-536 ◽  
Author(s):  
Hao Duan ◽  
Takuya Hosobata ◽  
Masahiro Takeda ◽  
Shinya MORITA ◽  
Yutaka Yamagata
Keyword(s):  
Machine Tool ◽  
Real Time ◽  
Data Storage ◽  
Optical Element ◽  
Linear Interpolation ◽  
Precision Machine ◽  
Control Code ◽  
Ultra Precision ◽  
Time Position ◽  
Circular Interpolation

This paper describes a development of a real-time position capturing method in which branched encoder signals are recorded in external data storage, to evaluate motion trajectories of the XYZ table on ultra-precision machine tool. The method allows the capturing with minimal modification to the machine: without any additional sensors. In the previous study we generated a non-axisymmetric aspherical optical element by XZC-axis simultaneous numerical controlled ultra-precision turning process with 2 μm form deviation, the reason of form accuracy degradation wasn’t identified. Using the developed system, motion accuracy of ultra-precision machine tool is confirmed. The machine tool moves along circular trajectory in three coordinate planes (XY, YZ and ZX) respectively. The rotation direction of circle is set clock wise and counter clock wise. The circle processing interpolation command by linear interpolation control code and circular interpolation control code. The results showed the effectiveness of the proposed method for performance evaluations of machine tools, by revealing the influence of trajectory parameters on the magnitudes of quadrant protrusions.

An expert system for hydro/aero-static spindle design used in ultra precision machine tool

2014 ◽  
Vol 30 (2) ◽  
pp. 107-113 ◽  
Author(s):  
Yingchun Liang ◽  
Wanqun Chen ◽  
Yazhou Sun ◽  
Nan Yu ◽  
Peng Zhang ◽  
...  
Keyword(s):  
Expert System ◽  
Machine Tool ◽  
Precision Machine ◽  
Ultra Precision
Sign in / Sign up

Export Citation Format

Share Document