A Novel Micromachining Techniques for Achieving Optical Structures with Arbitrary Sidewall Profiles

Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing ◽

10.1364/fio.2008.fthw4 ◽

2008 ◽

Author(s):

Lirong Sun ◽

Andrew Sarangan

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