scholarly journals All-Sapphire Fiber-Optic Pressure Sensors for Extreme Harsh Environments

2022 ◽  
Author(s):  
Zhiqiang Shao ◽  
Yalin Wu ◽  
Shuang Wang ◽  
Yan Wang ◽  
Zhiqiang Sun ◽  
...  
Sensors ◽  
2018 ◽  
Vol 18 (8) ◽  
pp. 2676
Author(s):  
Chen Li ◽  
Boshan Sun ◽  
Yanan Xue ◽  
Jijun Xiong

Alumina ceramic is a highly promising material for fabricating high-temperature pressure sensors. In this paper, a direct bonding method for fabricating a sensitive cavity with alumina ceramic is presented. Alumina ceramic substrates were bonded together to form a sensitive cavity for high-temperature pressure environments. The device can sense pressure parameters at high temperatures. To verify the sensitivity performance of the fabrication method in high-temperature environments, an inductor and capacitor were integrated on the ceramic substrate with the fabricated sensitive cavity to form a wireless passive LC pressure sensor with thick-film integrated technology. Finally, the fabricated sensor was tested using a system test platform. The experimental results show that the sensor can realize pressure measurements above 900 °C, confirming that the fabricated sensitive cavity has excellent sealing properties. Therefore, the direct bonding method can potentially be used for developing all-ceramic high-temperature pressure sensors for application in harsh environments.


2004 ◽  
Author(s):  
Juncheng Xu ◽  
Gary Pickrell ◽  
Bing Yu ◽  
Ming Han ◽  
Yizheng Zhu ◽  
...  

Sensors ◽  
2021 ◽  
Vol 21 (22) ◽  
pp. 7493
Author(s):  
Krystian L. Wlodarczyk ◽  
William N. MacPherson ◽  
Duncan P. Hand ◽  
M. Mercedes Maroto-Valer

In situ measurements are highly desirable in many microfluidic applications because they enable real-time, local monitoring of physical and chemical parameters, providing valuable insight into microscopic events and processes that occur in microfluidic devices. Unfortunately, the manufacturing of microfluidic devices with integrated sensors can be time-consuming, expensive, and “know-how” demanding. In this article, we describe an easy-to-implement method developed to integrate various “off-the-shelf” fiber optic sensors within microfluidic devices. To demonstrate this, we used commercial pH and pressure sensors (“pH SensorPlugs” and “FOP-MIV”, respectively), which were “reversibly” attached to a glass microfluidic device using custom 3D-printed connectors. The microfluidic device, which serves here as a demonstrator, incorporates a uniform porous structure and was manufactured using a picosecond pulsed laser. The sensors were attached to the inlet and outlet channels of the microfluidic pattern to perform simple experiments, the aim of which was to evaluate the performance of both the connectors and the sensors in a practical microfluidic environment. The bespoke connectors ensured robust and watertight connection, allowing the sensors to be safely disconnected if necessary, without damaging the microfluidic device. The pH SensorPlugs were tested with a pH 7.01 buffer solution. They measured the correct pH values with an accuracy of ±0.05 pH once sufficient contact between the injected fluid and the measuring element (optode) was established. In turn, the FOP-MIV sensors were used to measure local pressure in the inlet and outlet channels during injection and the steady flow of deionized water at different rates. These sensors were calibrated up to 140 mbar and provided pressure measurements with an uncertainty that was less than ±1.5 mbar. Readouts at a rate of 4 Hz allowed us to observe dynamic pressure changes in the device during the displacement of air by water. In the case of steady flow of water, the pressure difference between the two measuring points increased linearly with increasing flow rate, complying with Darcy’s law for incompressible fluids. These data can be used to determine the permeability of the porous structure within the device.


2012 ◽  
Author(s):  
Tongqing Liu ◽  
Ming Han ◽  
Cody Raml ◽  
Dennis R. Alexander ◽  
Xiangnan He ◽  
...  

2014 ◽  
Vol 2014 (DPC) ◽  
pp. 001851-001892
Author(s):  
Thibault Buisson

MEMS are found in many applications, ranging from large volume consumer applications such as mobile phones to specific high end devices for defense or space. MEMS market will continue to see steady, sustainable double digit growth for the next six years, with 20% compound average annual growth in units and 13% growth in revenues, to become a $21 billion market by 2017. Automotive applications represent today around 20% of the MEMS market in revenue and are expected to see a 5.4 % growth in the next five years, which means that the penetration of MEMS devices in this market will remain limited. Today, MEMS family in cars is mainly represented by pressure sensors for Tire Pressure Monitoring and Manifold Air Pressure sensing, and accelerometers in ABS and stabilization systems. These applications are reaching maturity, which mean that their growth gets directly related to the car sales. To find new growth opportunities, system integrators have been trying to develop new MEMS based systems to enhance safety, comfort and reduce pollution and energy consumption. The presentation will show emerging applications and the challenges they face from a technical and a market point of view. Diverse electronic packages operate under exceptionally harsh environments, which require extended lifetimes, presenting a significant challenge for the microelectronics community. Operating temperatures above 200 °C together with high pressures, vibrations and potentially corrosive environments implies that some technical issues regarding the development of electronic systems that will operate at such high temperature remain. Technology based on sintering has been recently emerging for power modules, capable of withstanding up to 300 °C. Sintered Ag is one potential candidate for die attachment for extreme environments. The application of sintered Ag has proven already to significantly increase the lifetime of interconnects when compared to solder joints. Both characterization of the failure mechanisms as well as prediction of product life in such environments is critical to the long term reliability of these devices. The present work aims to develop an understanding of how and why attach materials for Si dies degrade/fail under harsh environments by investigating sintered Ag material. New failure mechanisms will become dominant in the sintered Ag technology. Modeling helps understanding how a particular system behaves if conditions are altered. Thus, a 2D axis symmetric die attach model, commonly used to represent microelectronic package assemblies, was generated using Ansys Workbench. The FE-model provided a good understanding of the effect of single parameter variation of different leadframe materials (K64, K14, and FeNi42), chip height, sintered Ag and metallization thicknesses. The FE-model provided a rapid assessment of delamination, cracking and other defects and their location within the package. The effect of the sintered Ag thickness on the plastic strain was only slight. Furthermore, on the chip side, the local thermal mismatch between the Si die and the sintered Ag was the most important loading factor. Also, thicker chips generated higher stresses. Further analysis of simulation and experiment of sintered Ag interconnects will give more insight on dominating failure mechanisms, and help reduce failure risks.


2015 ◽  
Vol 2015 (1) ◽  
pp. 000609-000615 ◽  
Author(s):  
John Mazurowski

Present fiber optic connections need to align two or more optical fibers to accuracies of microns (multimode fiber) and tenths of a micron (single more fiber). For connections in rugged applications, consisting of wide temperature ranges, substantial vibration, or in the presence of contaminants, the alignment of normal physical contact connections becomes even more difficult. New expanded beam connectors make fiber optic connections more durable, and help stabilize the transmission of high speed optical signals between systems, boxes, boards, and devices in these harsh environments.


2009 ◽  
Vol 63 (8) ◽  
pp. 932-935 ◽  
Author(s):  
Jian Zhang ◽  
Feibing Xiong ◽  
Nicholas Djeu

The influence of particulates on sapphire fiber evanescent wave absorption by water has been studied. Suspensions containing microsized graphite flakes and glassy carbon powder were used. Conventional free-space transmittance measurements of these samples showed strong absorption and scattering, which severely screened the absorption by water. However, the absorption on the water band determined from the evanescent wave interaction was unaffected by the presence of the graphite flakes. These results indicate that fiber-optic evanescent wave chemical sensors may be suitable for process control applications involving turbid reactor streams.


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