THREE-AXIAL MICROOPTOELECTROMECHANICAL ANGULAR RATE TRANSDUCER BASED ON THE OPTICAL TUNNELING EFFECT
2016 ◽
Vol 52
(2)
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pp. 210-215
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Keyword(s):
2013 ◽
Vol 19
(3)
◽
pp. 9000310-9000310
◽
2016 ◽
Vol 737
◽
pp. 012045
◽