scholarly journals Selective Etching of Silicon Nitride Over Silicon Oxide using ClF3/H2 Remote Plasma

2021 ◽  
Author(s):  
Won Oh Lee ◽  
Ki Hyun Kim ◽  
Doo San Kim ◽  
You Jin Ji ◽  
Ji Eun Kang ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Inductively Coupled Plasma ◽  
Etch Rate ◽  
Room Temperature ◽  
Silicon Oxide ◽  
Remote Plasma ◽  
Inductively Coupled ◽  
Isotropic Etching ◽  
A Current

Abstract Precise and selective removal of silicon nitride in a SiNx/SiOy stack is crucial for a current 3D-NAND (not and) fabrication process. In this study, fast and ultra-high selective isotropic etching of SiNx have been studied using a ClF3/H2 remote plasma in an inductively coupled plasma system and a mechanism of SiNx etching was investigated by focusing on the role of Cl, F, and H radicals in the plasma. The SiNx etch rate over 800 Å/min with the etch selectivity of ~130 could be observed under a ClF3 remote plasma at a room temperature. Furthermore, compromising the etch rate of SiNx by adding H2 to the ClF3 plasma, the etch selectivity of SiNx over SiOy close to ~ 200 could be obtained. The etch characteristics of SiNx and SiOy with increasing the process temperature demonstrated the higher activation energy of SiOy compared to that of SiNx with ClF3 plasma.

Properties of Silicon Nitride by Room-Temperature Inductively Coupled Plasma Deposition

2005 ◽  
pp. 77-86
Author(s):  
H. Zhou ◽  
C. Sim ◽  
A. Glidle ◽  
C. Hodson ◽  
C. R. Kinsey ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Inductively Coupled Plasma ◽  
Room Temperature ◽  
Plasma Deposition ◽  
Inductively Coupled

scholarly journals Authentication and Traceability Study on Barbera d’Asti and Nizza DOCG Wines: The Role of Trace- and Ultra-Trace Elements

Beverages ◽  
2020 ◽  
Vol 6 (4) ◽  
pp. 63
Author(s):  
Maurizio Aceto ◽  
Federica Gulino ◽  
Elisa Calà ◽  
Elisa Robotti ◽  
Maurizio Petrozziello ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Multivariate Data Analysis ◽  
Market Value ◽  
Elemental Distribution ◽  
Average Price ◽  
Chemical Markers ◽  
Grape Variety ◽  
Inductively Coupled ◽  
Ultra Trace

Barbera d’Asti—including Barbera d’Asti superiore—and Nizza are two DOCG (Denominazione di Origine Controllata e Garantita) wines produced in Piemonte (Italy) from the Barbera grape variety. Differences among them arise in the production specifications in terms of purity, ageing, and zone of production, in particular with concern to Nizza, which follows the most stringent rules, sells at three times the average price, and is considered to have the highest market value. To guarantee producers and consumers, authentication methods must be developed in order to distinguish among the different wines. As the production zones totally overlap, it is important to verify whether the distinction is possible or not according to metals content, or whether chemical markers more linked to winemaking are needed. In this work, Inductively Coupled Plasma (ICP) elemental analysis and multivariate data analysis are used to study the authentication and traceability of samples from the three designations of 2015 vintage. The results show that, as far as elemental distribution in wine is concerned, work in the cellar, rather than geographic provenance, is crucial for the possibility of distinction.

Temperature dependence of the etch rate and selectivity of silicon nitride over silicon dioxide in remote plasma NF3/Cl2

1995 ◽  
Vol 67 (13) ◽  
pp. 1902-1904 ◽  
Author(s):  
J. Staffa ◽  
D. Hwang ◽  
B. Luther ◽  
J. Ruzyllo ◽  
R. Grant
Keyword(s):  
Silicon Nitride ◽  
Silicon Dioxide ◽  
Temperature Dependence ◽  
Etch Rate ◽  
Remote Plasma

Room Temperature Band-Edge Luminescence from Silicon Grains Prepared by the Recrystallization of Mesoporous Silicon

1996 ◽  
Vol 452 ◽  
Author(s):  
Karen L. Moore ◽  
Leonid Tsybeskov ◽  
Philippe M. Fauchet ◽  
Dennis G. Hall
Keyword(s):  
Room Temperature ◽  
Silicon Oxide ◽  
Crystalline Silicon ◽  
Band Edge ◽  
Applied Bias ◽  
Mesoporous Silicon ◽  
Room Temperature Photoluminescence ◽  
Band Edge Luminescence ◽  
A Current ◽  
Better Than

AbstractRoom-temperature photoluminescence (PL) peaking at 1.1 eV has been found in electrochemically etched mesoporous silicon annealed at 950°C. Low-temperature PL spectra clearly show a fine structure related to phonon-assisted transitions in pure crystalline silicon (c-Si) and the absence of defect-related (e.g.P-line) and impurity-related (e.g.oxygen, boron) transitions. The maximum PL external quantum efficiency (EQE) is found to be better than 0.1% with a weak temperature dependence in the region from 12K to 400K. The PL intensity is a linear function of excitation intensity up to 100 W/cm2. The PL can be suppressed by an external electric field ≥ 105 V/cm. Room temperature electroluminescence (EL) related to the c-Si band-edge is also demonstrated under an applied bias ≤ 1.2 V and with a current density ≈ 20 mA/cm2. A model is proposed in which the radiative recombination originates from recrystallized Si grains within a non-stoichiometric Si-rich silicon oxide (SRSO) matrix.

scholarly journals Comparison of Chromium and Iron Distribution in Serum and Urine among Healthy People and Prediabetes and Diabetes Patients

2019 ◽  
Vol 2019 ◽  
pp. 1-8 ◽  
Author(s):  
Qi Zhou ◽  
Wenjia Guo ◽  
Yanan Jia ◽  
Jiancheng Xu
Keyword(s):  
Inductively Coupled Plasma ◽  
Chinese Population ◽  
Potential Role ◽  
Fasting Glucose ◽  
Inductively Coupled ◽  
Simvastatin Therapy ◽  
Plasma Spectrometer

The effect of chromium (Cr) and iron (Fe) on prevalence of diabetes has received great attention. This study investigated serum and urinary Cr and Fe levels among patients with impaired fasting glucose (IFG), impaired glucose tolerance (IGT), type 1 diabetes (T1D), and type 2 diabetes (T2D) in the Northeast Chinese population. From January 2010 to October 2011, patients with IFG (n=12), IGT (n=15), T1D (n=25), T2D (n=137) and healthy controls (n=50) were enrolled in the First Hospital of Jilin University. Trace elements were detected using an inductively coupled plasma spectrometer. Serum Cr levels decreased in T2D without complications, diabetic retinopathy (DR), diabetic peripheral neuropathy (DPN), and diabetic nephropathy (DN) (P<0.05). The urinary Cr level in T1D was the highest of all, which significantly exceeded those of the T2D groups with and without complications. No significant differences of serum Fe levels were found among all groups. The urinary Fe level of T1D was significantly increased (P<0.05). The correlation between serum Cr and serum Fe in T2D was obviously positive (P<0.05). One month of simvastatin therapy exerted no effects on serum or urinary Cr and Fe levels. These results suggest the potential role of Cr and Fe in diabetes should receive attention.

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