Ultra-Low Specific on-Resistance Achieved in 3.3 kV-Class SiC Superjunction MOSFET

2021 33rd International Symposium on Power Semiconductor Devices and ICs (ISPSD) ◽

10.23919/ispsd50666.2021.9452273 ◽

2021 ◽

Author(s):

Masakazu Baba ◽

Takeshi Tawara ◽

Tadao Morimoto ◽

Shinsuke Harada ◽

Manabu Takei ◽

...

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