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Development of a Millimeter-Stroke Electrothermal Kirigami MEMS Actuator with Low Driving Power-Static and Dynamic Thermomechanical Characteristic of Film Bimorph-
Netsu Bussei
◽
10.2963/jjtp.34.109
◽
2020
◽
Vol 34
(4)
◽
pp. 109-116
Author(s):
Masaaki Hashimoto
◽
Yoshihiro Taguchi
Keyword(s):
Thermomechanical Characteristic
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