Greyscale lithography-based fabrication of thin polymeric cantilevers for MEMS/NEMS applications

CSVTU International Journal of Biotechnology Bioinformatics and Biomedical ◽

10.30732/ijbbb.20200502004 ◽

2020 ◽

Vol 5 (2) ◽

pp. 40-44

Author(s):

Abhiru Kumar Basu ◽

Adreeja Basu ◽

Shantanu Bhatrachharya

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