scholarly journals A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity–Density Sensors

Sensors ◽  
2019 ◽  
Vol 19 (3) ◽  
pp. 658 ◽  
Author(s):  
Víctor Ruiz-Díez ◽  
Javier Toledo ◽  
Jorge Hernando-García ◽  
Abdallah Ababneh ◽  
Helmut Seidel ◽  
...  

Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition between two mechanisms of losses with different geometrical dependence. To provide more insight, a comprehensive study of the Q-factor and the resonant frequency of these modes in microcantilever resonators with lengths and widths between 250 and 3000 µm and thicknesses between 10 and 60 µm is presented. These modes can be efficiently excited by a thin piezoelectric AlN film and a properly designed top electrode layout. The electrical and optical characterization of the resonators are performed in liquid media and then their performance is evaluated in terms of quality factor and resonant frequency. A quality factor as high as 140 was measured in isopropanol for a 1000 × 900 × 10 µm3 cantilever oscillating in the 11th order roof tile-shaped mode at 4 MHz; density and viscosity resolutions of 10−6 g/mL and 10−4 mPa·s, respectively are estimated for a geometrically optimized cantilever resonating below 1 MHz.

MRS Advances ◽  
2018 ◽  
Vol 3 (11) ◽  
pp. 595-601 ◽  
Author(s):  
John Alexander ◽  
Sergey Belikov ◽  
Sergei Magonov ◽  
Mark Smith

ABSTRACTThe main functions of the dynamic cantilever calibrator (DCC), which are related to characterization of AFM probes and instruments, are demonstrated on a variety of probes. The resonant frequency, Q-factor and spring constant of the rectangular and V-shaped probes were evaluated by thermal tune method. The inverse optical sensitivity and optical beam deflection noise, which define performance of AFM microscopes, were extracted from DCC data. Peculiarities of thermal tune studies and the use of DCC for advanced applications are discussed.


2016 ◽  
Vol 26 (8) ◽  
pp. 084008 ◽  
Author(s):  
V Ruiz-Díez ◽  
J Hernando-García ◽  
J Toledo ◽  
T Manzaneque ◽  
M Kucera ◽  
...  
Keyword(s):  

2019 ◽  
Vol 5 (1) ◽  
Author(s):  
Long Quang Nguyen ◽  
Peter Emil Larsen ◽  
Tom Larsen ◽  
Sanjukta Bose Goswami ◽  
Luis Guillermo Villanueva ◽  
...  

Abstract Thermal analysis is essential for the characterization of polymers and drugs. However, the currently established methods require a large amount of sample. Here, we present pyrolytic carbon resonators as promising tools for micromechanical thermal analysis (MTA) of nanograms of polymers. Doubly clamped pre-stressed beams with a resonance frequency of 233 ± 4 kHz and a quality factor (Q factor) of 800 ± 200 were fabricated. Optimization of the electrical conductivity of the pyrolytic carbon allowed us to explore resistive heating for integrated temperature control. MTA was achieved by monitoring the resonance frequency and quality factor of the carbon resonators with and without a deposited sample as a function of temperature. To prove the potential of pyrolytic carbon resonators as thermal analysis tools, the glass transition temperature (Tg) of semicrystalline poly(L-lactic acid) (PLLA) and the melting temperature (Tm) of poly(caprolactone) (PCL) were determined. The results show that the Tg of PLLA and Tm of PCL are 61.0 ± 0.8 °C and 60.0 ± 1.0 °C, respectively, which are in excellent agreement with the values measured by differential scanning calorimetry (DSC).


2017 ◽  
Vol 45 (3) ◽  
pp. 175-199 ◽  
Author(s):  
Mattias Hjort ◽  
Olle Eriksson ◽  
Fredrik Bruzelius

ABSTRACT This work presents a comprehensive study of the performance of winter tires on snow, ice, and asphalt. A set of 77 different winter tires were carefully selected for the study. Of these, 27 were new and 50 were worn from real traffic use. All three tire types for winter conditions (Nordic, European, and studded) were represented. All tires have been tested using a mobile tire-testing device for snow and asphalt and using a stationary tire-testing facility for ice. Both devices recorded the tire forces and motions, enabling a close to complete stationary characterization of the tires. In addition, 42 of the tires were tested on a passenger car, where brake performance was evaluated for the three different road conditions. This enables a comparative study of performance between tire types and wear for various winter road conditions. The results suggest that the recorded data represent real vehicle performance. Some conclusions from the measurements are that the effect of wear is consistent between the tire groups and that the performance degradation is most noticeable on studded tires on ice and on European tires on snow.


2008 ◽  
Vol 354 (19-25) ◽  
pp. 2227-2230 ◽  
Author(s):  
J. Kočka ◽  
T. Mates ◽  
M. Ledinský ◽  
H. Stuchlíková ◽  
J. Stuchlík ◽  
...  

Sensors ◽  
2021 ◽  
Vol 21 (10) ◽  
pp. 3385
Author(s):  
Jialu Ma ◽  
Jingchao Tang ◽  
Kaicheng Wang ◽  
Lianghao Guo ◽  
Yubin Gong ◽  
...  

A complex permittivity characterization method for liquid samples has been proposed. The measurement is carried out based on a self-designed microwave sensor with a split ring resonator (SRR), the unload resonant frequency of which is 5.05 GHz. The liquid samples in capillary are placed in the resonant zone of the fabricated senor for high sensitivity measurement. The frequency shift of 58.7 MHz is achieved when the capillary is filled with ethanol, corresponding a sensitivity of 97.46 MHz/μL. The complex permittivity of methanol, ethanol, isopropanol (IPA) and deionized water at the resonant frequency are measured and calibrated by the first order Debye model. Then, the complex permittivity of different concentrations of aqueous solutions of these materials are measured by using the calibrated sensor system. The results show that the proposed sensor has high sensitivity and accuracy in measuring the complex permittivity of liquid samples with volumes as small as 0.13 μL. It provides a useful reference for the complex permittivity characterization of small amount of liquid chemical samples. In addition, the characterization of an important biological sample (inositol) is carried out by using the proposed sensor.


2021 ◽  
Author(s):  
Norhanani Binte Jaafar ◽  
Chong Ser Choong ◽  
Sharon Lim Pei Siang ◽  
Chai Tai Chong

Author(s):  
Mary Gopanchuk ◽  
Mohamed Arabi ◽  
N. Nelson-Fitzpatrick ◽  
Majed S. Al-Ghamdi ◽  
Eihab Abdel-Rahman ◽  
...  

This paper reports on the design, fabrication, and characterization of non-interdigitated comb drive actuators in Silicon-on-Insulator (SOI) wafers, using a single mask surface microma-chining process. The response of the actuator is analyzed numerically and experimentally. The results show at the fundamental frequency; it behaves as a longitudinal comb drive actuator. At a higher frequency, it exhibits a high-quality factor which is appropriate for sensor applications.


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