Terahertz-wave detector on silicon carbide platform
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Abstract We developed a novel terahertz-wave detector fabricated on a SiC platform implementing an InP/InGaAs Fermi-level managed barrier (FMB) diode. The FMB diode epi-layers were transferred on a SiC substrate, and a waveguide coupler and filters were monolithically integrated with an FMB diode. Then, fabricated detector chip was assembled in a fundamental mixer module with a WR-3 rectangular-waveguide input port. It exhibited a minimum noise equivalent power as low as 3e-19 W/Hz at around 300 GHz for a local oscillator power of only 30 microwatts.
2004 ◽
Vol 46
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pp. 245-264
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