皮秒激光扫描硅材料微孔自成形行为及机理研究

Laser & Optoelectronics Progress ◽

10.3788/lop202259.0114005 ◽

2022 ◽

Vol 59 (1) ◽

pp. 0114005

Author(s):

李鑫 Li Xin ◽

张彤 Zhang Tong ◽

季凌飞 Ji Lingfei ◽

张犁天 Zhang Litian

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