Methodology for the Selection of Technological Modes for the Synthesis of Transparent Conducting Oxides with Desired Properties

2022 ◽  
Vol 1049 ◽  
pp. 198-203
Author(s):  
Timur O. Zinchenko ◽  
Ekaterina A. Pecherskaya ◽  
Vladimir V. Antipenko ◽  
Artem V. Volik ◽  
Yuriy A. Varenik ◽  
...  

Transparent conducting oxides (TCOs) are widely used as a transparent electrode in various fields of opto-and semiconductor electronics. The main materials used today are indium-tin oxide, tin-antimony oxide and zinc-aluminum oxide. The authors have developed and improved the spray-pyrolysis method, which is one of the most promising methods of implementation in production. In this work, the study of tin dioxide doped with antimony coatings and the development of a methodology for the controlled synthesis of TCO, taking into account the effect of technological modes of deposition on the TCO parameters. The results of the performed studies contribute to the development of an automated technology for the synthesis of transparent conducting oxides with desired properties.

MRS Bulletin ◽  
2000 ◽  
Vol 25 (8) ◽  
pp. 38-44 ◽  
Author(s):  
Tadatsugu Minami

Most research to develop highly transparent and conductive thin films has focused on n-type semiconductors consisting of metal oxides. Historically, transparent conducting oxide (TCO) thin films composed of binary compounds such as SnO2 and In2O3 were developed by means of chemical- and physical-deposition methods. Impurity-doped SnO2 (Sb- or F-doped SnO2, e.g., SnO2:Sb or SnO2: F) and In2O3: Sn (indium tin oxide, ITO) films are in practical use. In addition to binary compounds, ternary compounds such as Cd2SnO4, CdSnO3, and CdIn2O4 were developed prior to 1980, but their TCO films have not yet been used widely.


1998 ◽  
Vol 508 ◽  
Author(s):  
George B. Palmer ◽  
Kenneth R. Poeppelmeier ◽  
Doreen D. Edwards ◽  
Thomas O. Mason

AbstractBulk samples of transparent conducting oxides (TCOs) in the Zn-In-Sn and Ga-In-Sn oxide systems were prepared by solid state processing. Phase relations and physical properties were determined and the results compared to similar measurements on thin film materials.


2011 ◽  
Vol 1315 ◽  
Author(s):  
Matin Amani ◽  
Ian Tougas ◽  
Otto J. Gregory

ABSTRACTTransparent conducting oxides have been previously investigated for both bulk and thin film thermoelectric applications, and have shown promising results due to their thermal stability and electrical conductivity. Alloys of two or more transparent conducting oxides have been deposited using pulsed laser deposition (PLD) and combinatorial sputtering, and the resulting films were optimized for optical applications. In this study, thermoelectric materials were prepared by co-sputtering techniques, whereby a chemical gradient was formed across an alumina substrate that was patterned using photolithography to form hundreds of micro-thermocouples. The systems indium tin oxide (ITO), indium zinc oxide (IZO), and zinc tin oxide (ZTO) were investigated for this purpose and the resulting combinatorial libraries were rapidly screened to establish room temperature resistivity, Seebeck coefficient, and power factor as functions of both composition and heat treatment, in nitrogen and air ambients. Due to their chemical stability, oxidation resistance, and large Seebeck coefficients relative to metal thermocouples, these materials are ideal for temperature measurement or energy harvesting in harsh environments such as gas turbine engines.


2009 ◽  
Vol 105 (5) ◽  
pp. 053704 ◽  
Author(s):  
Titas Dutta ◽  
P. Gupta ◽  
V. Bhosle ◽  
J. Narayan

2005 ◽  
Vol 13 (19) ◽  
pp. 7380 ◽  
Author(s):  
Guoyang Xu ◽  
Zhifu Liu ◽  
Jing Ma ◽  
Boyang Liu ◽  
Seng-Tiong Ho ◽  
...  

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