Microscopy, Working and Types

Microscopy is a technique for making very small things visible to the unaided eye. An instrument used to make the small things visible to the naked (unaided) eye is called a microscope. Scanning electron microscopy is discussed in light of its principles, advantages, and applications. Comparisons of this system are made with the light microscopic and transmission electron systems. A cross section of pertinent literature on the scanning electron microscope, its development and use, has been integrated into the initial sections to provide a reference base for this general field. A detailed literature view on the use of this system in the field of wood science has also been included.

Изменение структуры и свойств приповерхностного слоя Si, имплантированного Zn, в зависимости от флюенса облучения ионами -=SUP=-132-=/SUP=-Xe-=SUP=-26+-=/SUP=- с энергией 167 МэВ

Физика и техника полупроводников ◽

10.21883/ftp.2019.03.47284.8979 ◽

2019 ◽

Vol 53 (3) ◽

pp. 332

Author(s):

В.В. Привезенцев ◽

В.С. Куликаускас ◽

В.А. Скуратов ◽

О.С. Зилова ◽

А.А. Бурмистров ◽

...

Keyword(s):

Electron Microscopy ◽

Zinc Oxide ◽

Cross Section ◽

Secondary Ion Mass Spectrometry ◽

Sample Surface ◽

Transmission Electron ◽

Oxide Phases ◽

Secondary Ion ◽

Surface Pores ◽

AbstractSingle-crystal n -Si(100) wafers are implanted with ^64Zn^+ ions with an energy of 50 keV and dose of 5 × 10^16 cm^–2. Then the samples are irradiated with ^132Xe^26+ ions with an energy of 167 MeV in the range of fluences from 1 × 10^12 to 5 × 10^14 cm^–2. The surface and cross section of the samples are visualized by scanning electron microscopy and transmission electron microscopy. The distribution of implanted Zn atoms is studied by time-of-flight secondary-ion mass spectrometry. After irradiation with Xe, surface pores and clusters consisting of a Zn–ZnO mixture are observed at the sample surface. In the amorphized subsurface Si layer, zinc and zinc-oxide phases are detected. After irradiation with Xe with a fluence of 5 × 10^14 cm^–2, no zinc or zinc-oxide clusters are detected in the samples by the methods used in the study.

Electron penetration effects in the Scanning Electron Microscope applied to Cu/Ta thin films

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100086842 ◽

1991 ◽

Vol 49 ◽

pp. 508-509

Author(s):

P. Bailey ◽

K. Holloway ◽

L. Clevenger ◽

N. Bojarczuk

Keyword(s):

Electron Microscopy ◽

Cross Section ◽

Diffusion Barrier ◽

Integrated Circuit ◽

Secondary Electron ◽

Structural Information ◽

Contact Structures ◽

Transmission Electron ◽

Current semi-conductor technology uses low-resistivity metals, as Cu, for integrated circuit conductor lines and contact structures. Copper, however, is quite mobile in silicon at elevated processing temperatures and a diffusion barrier such as Ta, is therefore required between the Si and Cu. The interdiffusion of Cu and Si with Ta as a diffusion barrier was studied in samples annealed between 500°C and 800“C, using scanning electron microscopy (SEM), and transmission electron microscopy (TEM). Secondary electron images obtained in the SEM, from 5keV to 25keV accelerating voltages were correlated to the structural information obtained by cross-section TEM. This work showed that annealing produced a compositionally non-uniform underlayer beneath the Ta film, and that the technique of varying the accelerating voltage in the SEM provides a means of quickly obtaining such information about underlying structures.

ISTFA 2000: Conference Proceedings from the 26th International Symposium for Testing and Failure Analysis ◽

A Novel Method to Analyze the Deep Trench Capacitors in DRAM

10.31399/asm.cp.istfa2000p0241 ◽

2000 ◽

Author(s):

Jack Lee ◽

Kuo-Hui Huang ◽

Jen-Lang Lue

Keyword(s):

Electron Microscopy ◽

Cross Section ◽

Three Dimensional ◽

Top Down ◽

Deep Trench ◽

Etching Solution ◽

Transmission Electron ◽

Novel Method ◽

Abstract A novel method has been developed to reveal the entire three dimensional (3D) deep trench (DT) capacitors for inspection in DRAM, especially NO capacitor dielectrics, ASG residues at corners, morphology etc., for process evaluation and failure analysis. It offers an alternative to conventional cross-section polishing, top down polishing or FIB milling methods. A DRAM chip was ground and polished down to a certain level from the chip backside. An etching solution was then applied to enhance the DTs appearance. 3D DTs can be inspected in scanning electron microscopy (SEM). The entire DTs or specific DT also can be lifted out for detailed investigation in transmission electron microscopy (TEM). The innovation of this technique is to provide a quick 3D observation in SEM, and much more flexibility to an entire DT inspection in TEM, which were not presented before.

Ultrastructural Analysis of the Salivary Glands of Gromphadorhina Portentosa (Schaum)

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100080614 ◽

1977 ◽

Vol 35 ◽

pp. 638-639

Author(s):

P.J. Dailey

Keyword(s):

Electron Microscopy ◽

Salivary Glands ◽

Secretory Vesicles ◽

The Past ◽

Transmission Electron ◽

Means Of Transmission ◽

Gromphadorhina Portentosa ◽

Scanning Electron ◽

Topographical Relief

The structure of insect salivary glands has been extensively investigated during the past decade; however, none have attempted scanning electron microscopy (SEM) in ultrastructural examinations of these secretory organs. This study correlates fine structure by means of SEM cryofractography with that of thin-sectioned epoxy embedded material observed by means of transmission electron microscopy (TEM).Salivary glands of Gromphadorhina portentosa were excised and immediately submerged in cold (4°C) paraformaldehyde-glutaraldehyde fixative1 for 2 hr, washed and post-fixed in 1 per cent 0s04 in phosphosphate buffer (4°C for 2 hr). After ethanolic dehydration half of the samples were embedded in Epon 812 for TEM and half cryofractured and subsequently critical point dried for SEM. Dried specimens were mounted on aluminum stubs and coated with approximately 150 Å of gold in a cold sputtering apparatus.Figure 1 shows a cryofractured plane through a salivary acinus revealing topographical relief of secretory vesicles.

Two- or three-way observations of the identical cell elements within the same sections by LM, TEM and/or SEM

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100081279 ◽

1978 ◽

Vol 36 (2) ◽

pp. 82-83 ◽

Cited By ~ 1

Author(s):

Nakazo Watari ◽

Yasuaki Hotta ◽

Yoshio Mabuchi

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Fine Structure ◽

Light Microscopy ◽

Thin Sections ◽

Transmission Electron ◽

Identical Cell ◽

Electron Microscopes ◽

It is very useful if we can observe the identical cell elements within the same sections by light microscopy (LM), transmission electron microscopy (TEM) and/or scanning electron microscopy (SEM) sequentially, because, the cell fine structure can not be indicated by LM, while the color is; on the other hand, the cell fine structure can be very easily observed by EM, although its color properties may not. However, there is one problem in that LM requires thick sections of over 1 μm, while EM needs very thin sections of under 100 nm. Recently, we have developed a new method to observe the same cell elements within the same plastic sections using both light and transmission (conventional or high-voltage) electron microscopes.In this paper, we have developed two new observation methods for the identical cell elements within the same sections, both plastic-embedded and paraffin-embedded, using light microscopy, transmission electron microscopy and/or scanning electron microscopy (Fig. 1).

Scanning and Transmission Microscopy of Nematocyst Batteries in Epitheliomuscular Cells of Hydra

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100066097 ◽

1971 ◽

Vol 29 ◽

pp. 410-411 ◽

Cited By ~ 1

Author(s):

Jane A. Westfall ◽

S. Yamataka ◽

Paul D. Enos

Keyword(s):

Electron Microscopy ◽

Osmium Tetroxide ◽

External Surface ◽

Three Dimensional ◽

Surface Structures ◽

Transmission Microscopy ◽

Transmission Electron ◽

Freeze Dried ◽

Scanning electron microscopy (SEM) provides three dimensional details of external surface structures and supplements ultrastructural information provided by transmission electron microscopy (TEM). Animals composed of watery jellylike tissues such as hydras and other coelenterates have not been considered suitable for SEM studies because of the difficulty in preserving such organisms in a normal state. This study demonstrates 1) the successful use of SEM on such tissue, and 2) the unique arrangement of batteries of nematocysts within large epitheliomuscular cells on tentacles of Hydra littoralis.Whole specimens of Hydra were prepared for SEM (Figs. 1 and 2) by the fix, freeze-dry, coat technique of Small and Màrszalek. The specimens were fixed in osmium tetroxide and mercuric chloride, freeze-dried in vacuo on a prechilled 1 Kg brass block, and coated with gold-palladium. Tissues for TEM (Figs. 3 and 4) were fixed in glutaraldehyde followed by osmium tetroxide. Scanning micrographs were taken on a Cambridge Stereoscan Mark II A microscope at 10 KV and transmission micrographs were taken on an RCA EMU 3G microscope (Fig. 3) or on a Hitachi HU 11B microscope (Fig. 4).

Application of Scanning Electron Microscopy to Medical Research

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100061963 ◽

1969 ◽

Vol 27 ◽

pp. 12-13

Author(s):

J. D. Hutchison

Keyword(s):

Electron Microscopy ◽

Electron Microscope ◽

Medical Research ◽

Prosthetic Heart Valve ◽

School Of Medicine ◽

Transmission Electron ◽

Definition Of ◽

Mechanism Of Failure ◽

The Brain ◽

When the transmission electron microscope was commercially introduced a few years ago, it was heralded as one of the most significant aids to medical research of the century. It continues to occupy that niche; however, the scanning electron microscope is gaining rapidly in relative importance as it fills the gap between conventional optical microscopy and transmission electron microscopy.IBM Boulder is conducting three major programs in cooperation with the Colorado School of Medicine. These are the study of the mechanism of failure of the prosthetic heart valve, the study of the ultrastructure of lung tissue, and the definition of the function of the cilia of the ventricular ependyma of the brain.

A Comparative Study of Fractographic Replicas

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100052845 ◽

1974 ◽

Vol 32 ◽

pp. 566-567

Author(s):

Loren Anderson ◽

Pat Pizzo ◽

Glen Haydon

Keyword(s):

Electron Microscopy ◽

Electron Microscopic Examination ◽

Direct Examination ◽

Electron Microscopic ◽

Reliable Technique ◽

Service Failures ◽

Transmission Electron ◽

Mode Of Failure ◽

Scanning Electron Microscopic ◽

Transmission electron microscopy of replicas has long been used to study the fracture surfaces of components which fail in service. Recently, the scanning electron microscope (SEM) has gained popularity because it allows direct examination of the fracture surface. However, the somewhat lower resolution of the SEM coupled with a restriction on the sample size has served to limit the use of this instrument in investigating in-service failures. It is the intent of this paper to show that scanning electron microscopic examination of conventional negative replicas can be a convenient and reliable technique for determining mode of failure.

Scanning and Transmission Electron Microscopy of Human Red Blood Cells

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100062129 ◽

1969 ◽

Vol 27 ◽

pp. 44-45

Author(s):

A.J. Tousimis ◽

T.R. Padden

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Blood Cells ◽

Room Temperature ◽

Type Specimen ◽

New Combination ◽

Human Red Blood Cells ◽

Transmission Electron ◽

Microscope Slides ◽

The size, shape and surface morphology of human erythrocytes (RBC) were examined by scanning electron microscopy (SEM), of the fixed material directly and by transmission electron microscopy (TEM) of surface replicas to compare the relative merits of these two observational procedures for this type specimen.A sample of human blood was fixed in glutaraldehyde and washed in distilled water by centrifugation. The washed RBC's were spread on freshly cleaved mica and on aluminum coated microscope slides and then air dried at room temperature. The SEM specimens were rotary coated with 150Å of 60:40- gold:palladium alloy in a vacuum evaporator using a new combination spinning and tilting device. The TEM specimens were preshadowed with platinum and then rotary coated with carbon in the same device. After stripping the RBC-Pt-C composite film, the RBC's were dissolved in 2.5N HNO3 followed by 0.2N NaOH leaving the preshadowed surface replicas showing positive topography.

Copper Localization in Cirrhotic Rat Liver by Scanning Electron Microscopy

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100062099 ◽

1969 ◽

Vol 27 ◽

pp. 38-39 ◽

Cited By ~ 1

Author(s):

J. C. Russ ◽

E. McNatt

Keyword(s):

Electron Microscopy ◽

Endoplasmic Reticulum ◽

Electron Microscope ◽

Copper Acetate ◽

Lead Citrate ◽

Dense Bodies ◽

Transmission Electron ◽

Electron Mode ◽

In order to study the retention of copper in cirrhotic liver, rats were made cirrhotic by carbon tetrachloride inhalation twice weekly for three months and fed 0.2% copper acetate ad libidum in drinking water for one month. The liver tissue was fixed in osmium, sectioned approximately 2000 Å thick, and stained with lead citrate. The section was examined in a scanning electron microscope (JEOLCO JSM-2) in the transmission electron mode.Figure 1 shows a typical area that includes a red blood cell in a sinusoid, a disse, and a portion of the cytoplasm of a hepatocyte which contains several mitochondria, peribiliary dense bodies, glycogen granules, and endoplasmic reticulum.