Analysis of Distributing Thin-Film Coating Thickness When Using the Magnetron Sputtering Systems with Planetary Movement of Substrate

Gayk Sagatelyan; Andrey Shishlov

doi:10.7463/1114.0733662

Analysis of Distributing Thin-Film Coating Thickness When Using the Magnetron Sputtering Systems with Planetary Movement of Substrate

Science and Education of the Bauman MSTU ◽

10.7463/1114.0733662 ◽

2014 ◽

Vol 14 (11) ◽

Author(s):

Gayk Sagatelyan ◽

Andrey Shishlov

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Coating Thickness ◽

Film Coating ◽

Thin Film Coating

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Mô hình hoá và mô phỏng quá trình tạo màng Al2O3 bằng phún xạ Magnetron = Modeling and simulation of the magnetron sputtering process for Al2O3 thin film coating.

Science and Technology Development Journal ◽

10.3125/jstd.v10i3.425 ◽

2007 ◽

Vol 10 (3) ◽

Author(s):

Phúc Giang Văn ◽

Tuấn Hùng Vũ Lê ◽

Đạt Thành Huỳnh ◽

Đến Văn Nguyễn

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Modeling And Simulation ◽

Film Coating ◽

Thin Film Coating ◽

Al2o3 Thin Film

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Improving Surface Quality of Additive Manufactured Metal Parts by Magnetron Sputtering Thin Film Coating

10.1007/978-3-030-90421-0_36 ◽

2021 ◽

pp. 436-443

Author(s):

Binnur Sağbaş ◽

Hüseyin Yüce ◽

Numan M. Durakbasa

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Surface Quality ◽

Film Coating ◽

Thin Film Coating ◽

Metal Parts

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Thin film coating techniques on wires and inner walls of small tubes via cylindrical magnetron sputtering

Electrical Engineering in Japan ◽

10.1002/eej.4391030104 ◽

1983 ◽

Vol 103 (1) ◽

pp. 16-22

Author(s):

Youichi Hoshi ◽

Masahiko Naoe ◽

Shun'Ichi Yamanaka

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Film Coating ◽

Thin Film Coating ◽

Cylindrical Magnetron

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Thin-film coating of vibro-fluidized microparticles via R. F. Magnetron sputtering

Micro- and Nanotechnology Sensors, Systems, and Applications X ◽

10.1117/12.2300265 ◽

2018 ◽

Cited By ~ 1

Author(s):

Benjamin Garrett ◽

Mathew Zablocki ◽

Mark S. Mirotznik ◽

Nicholas Hudak ◽

Ahmed S. Sharkawy ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Film Coating ◽

Thin Film Coating

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GIXRD, Raman and Surface analysis of TiC thin film coating produced by RF Magnetron Sputtering

Journal of Physics Conference Series ◽

10.1088/1742-6596/1378/2/022032 ◽

2019 ◽

Vol 1378 ◽

pp. 022032 ◽

Cited By ~ 1

Author(s):

O.O. Abegunde ◽

E.T. Akinlabi ◽

O.P. Oladijo

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Surface Analysis ◽

Rf Magnetron Sputtering ◽

Film Coating ◽

Thin Film Coating

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Thin film coating of copper nanoparticles with DC magnetron sputtering via physical vapor deposition

10.1063/1.5118128 ◽

2019 ◽

Author(s):

Muhammad Rosli Abdullah ◽

Noor Hasmiza Harun ◽

S. Noorjannah Ibrahim ◽

Azimah Abdul Wahab

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Copper Nanoparticles ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Film Coating ◽

Dc Magnetron Sputtering ◽

Thin Film Coating

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Quantification of thin-film coating thickness of pharmaceutical tablets using wavelet analysis of terahertz pulsed imaging data

2009 34th International Conference on Infrared, Millimeter, and Terahertz Waves ◽

10.1109/icimw.2009.5324921 ◽

2009 ◽

Cited By ~ 5

Author(s):

Shuncong Zhong ◽

Yao-Chun Shen ◽

Mike Evans ◽

J. Axel Zeitler ◽

Robert K. May ◽

...

Keyword(s):

Thin Film ◽

Wavelet Analysis ◽

Coating Thickness ◽

Film Coating ◽

Imaging Data ◽

Thin Film Coating ◽

Pharmaceutical Tablets ◽

Terahertz Pulsed Imaging

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Effect of YSZ thin film coating thickness on the strength of a ceramic substrate

Journal of Biomedical Materials Research Part B Applied Biomaterials ◽

10.1002/jbm.b.30855 ◽

2007 ◽

Vol 83B (2) ◽

pp. 459-463 ◽

Cited By ~ 8

Author(s):

Erica C. Teixeira ◽

Jeffrey R. Piascik ◽

Brian R. Stoner ◽

Jeffrey Y. Thompson

Keyword(s):

Thin Film ◽

Coating Thickness ◽

Film Coating ◽

Ceramic Substrate ◽

Thin Film Coating ◽

Ysz Thin Film

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Creep Behaviour and Adhesion Properties of TiC Thin Film Coating Grown by RF Magnetron Sputtering

Lecture Notes in Mechanical Engineering - Advances in Manufacturing Engineering ◽

10.1007/978-981-15-5753-8_7 ◽

2020 ◽

pp. 69-76

Author(s):

Abegunde Olayinka ◽

Esther T. Akinlabi ◽

O. P. Oladijo

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Creep Behaviour ◽

Rf Magnetron Sputtering ◽

Film Coating ◽

Thin Film Coating ◽

Adhesion Properties

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Influence of the planar cylindrical target erosion zone of magnetron sputtering on the uniformity of a thin-film coating

Journal of Physics Conference Series ◽

10.1088/1742-6596/584/1/012012 ◽

2015 ◽

Vol 584 ◽

pp. 012012 ◽

Cited By ~ 1

Author(s):

D D Vasilev ◽

K M Moiseev

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Film Coating ◽

Thin Film Coating ◽

Cylindrical Target ◽

Erosion Zone

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