Modification of Semianalytical Finite Element Model for Radio Frequency Sheaths in Single- and Dual-Frequency Capacitively Coupled Plasmas: II. Effects of Nonuniform Bulk Plasma Density and Charging at Dielectric Surface
2011 ◽
Vol 50
(3R)
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pp. 036001
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2011 ◽
Vol 50
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pp. 036001
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2010 ◽
Vol 49
(5)
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pp. 056202
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2009 ◽
Vol 48
(9)
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pp. 090209
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1986 ◽
Vol 19
(4)
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pp. 807-824
2021 ◽
Vol 26
(3)
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pp. 04021002
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2020 ◽
Vol 11
(3)
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pp. 187-207
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