Design of a large-range rotary microgripper with freeform geometries using a genetic algorithm

This paper describes a novel electrostatically actuated microgripper with freeform geometries designed by a genetic algorithm. This new semiautomated design methodology is capable of designing near-optimal MEMS devices that are robust to fabrication tolerances. The use of freeform geometries designed by a genetic algorithm significantly improves the performance of the microgripper. An experiment shows that the designed microgripper has a large displacement (91.5 μm) with a low actuation voltage (47.5 V), which agrees well with the theory. The microgripper has a large actuation displacement and can handle micro-objects with a size from 10 to 100 μm. A grasping experiment on human hair with a diameter of 77 μm was performed to prove the functionality of the gripper. The result confirmed the superior performance of the new design methodology enabling freeform geometries. This design method can also be extended to the design of many other MEMS devices.

Bouncing dynamics of electrostatically actuated NEM switches

The aim of the present research is to understand the bouncing dynamic behavior of nano electromechanical (NEM) switches in order to improve the switch performance and reliability. It is well known that bouncing can dramatically degrade the switch performance and life; hence, in the present study, the bouncing dynamics of a cantilever-based NEM switch has been studied in detail. To this end, the repulsive van der Waals force is incorporated into a nano-switch model to capture the contact dynamics. Intermolecular forces, surface effects, and gas rarefication effects were also included in the proposed model. The Euler-Bernoulli beam theory and an approximate approach based on Galerkin’s method have been employed to predict transient dynamic responses. In the present study, performance parameters such as initial contact time, permanent contact time, major bounce height, and the number of bounces, were quantified in the presence of interactive system nonlinearities. The performance parameters were used to investigate the influence of surface effects and rarefication effects on the performance of an electrostatically actuated switch. Recommended operating conditions are suggested to avoid excessive bouncing for these types of NEM switches.

RF MEMS electrostatically actuated tunable capacitors and their applications: a review

This paper reviews the recent developments of micro-electromechanical system (MEMS) based electrostatically actuated tunable capacitors. MEMS based tunable capacitors (MBTCs) are important building blocks in advanced radio frequency communication systems and portable electronics. This is due to their excellent performance compared to solid state counterpart. Different designs, tuning mechanisms, and performance parameters of MBTCs are discussed, compared, and summarized. Several quantitative comparisons in terms of tuning range, quality factor (Q factor), and electrodes configurations are presented, which provide deep insight into different design studies, assists in selecting designs, and layouts that best suit various applications. We also highlight recent modern applications of tunable capacitors, such as mobile handsets, internet of things, communication sensors, and 5G antennas. Finally, the paper discusses different design approaches and proposes guidelines for performance improvement.

Investigation of an electrostatically actuated imperfect circular microplate under transverse pressure for pressure sensor applications

In this paper, we present static and dynamic analysis of an electrostatically actuated imperfect circular microplate under transverse pressure. In modelling of the microplate, we have included both von Kármán geometric and electrostatic force nonlinearities in the development of the equation of motion. The equation of motion has been solved using Galerkin based reduced order modelling technique. The developed reduced order model has been first validated by comparing it with finite element simulation results. Further, the effects of imperfection as initial curvature and uniform transverse pressure have been investigated on the static and dynamic characteristics of the electrostatically actuated circular microplate. We have also investigated the effects of imperfection and applied DC voltage on the pressure sensitivity of the circular microplate. We have found that both imperfection and electrostatic load are responsible for appreciable variations in sensitivity. This detailed investigation is useful to design an imperfect micro pressure sensor.

Getting Ready for Beyond-5G, Super-IoT and 6G at Hardware Passive Components Level – A Multi-State RF-MEMS Monolithic Step Attenuator Analyzed up to 60 GHz

Looking at 2030, the landscape of technology will be dominated by paradigms like 6G, Super-IoT (Internet of Things) and Tactile Internet (TI). From the perspective of Hardware (HW) components technologies, the turning into reality of such scenarios will demand for a radical reconceptualization of devices, sub-systems and systems, probably modifying the concept of HW itself. Driven by the target of taking initial steps in the direction of such future applications, this work discusses a 4 bit RF power step attenuator entirely realized in RF-MEMS technology. Physical samples are fabricated in a surface micromachining technology and rely on electrostatically actuated cantilevered MEMS ohmic switches to select or short resistive loads placed along the RF line. Fabricated devices are tested and validated up to 30 GHz, while simulations are discussed up to 60 GHz for the full set of allowed configurations. Despite a few technology non-idealities, the network shows levels of attenuation with a flatness as good as 1 dB over 60 GHz frequency span. The measured and simulated data reported in this work offer important indications on how to improve the network concept, both at technology and design level.

Tristable Properties in Electrostatically Actuated Initially Curved Coupled Micro Beams

A limit point behaviour analysis of a metastructure, composed of two double clamped, initially curved beams, coupled via a rigid truss at their respective centres, is carried out when subjected to a distributed electrostatic load. The analysis is based on a reduced order (RO) model resulting from Galerkin’s decomposition, with symmetric buckling modes taken as the base functions, for either beam. All solutions employed the implicit arc-length “Riks” method to accommodate for winding equilibrium paths, while validation of the said results were carried out against finite differences (FD) direct solutions. In addition, local stability analysis via the energy method, conducted on the primary beam was instrumental in clarifying the role of the various extremum points by characterising which branches are stable, and which are not. The combined analysis has shown that the driving beam, which directly encounters the load, is able to possess bistable as well as tristable properties, provided that the metastructure meets certain geometrical parameters. Several variations of tristability are disclosed in the study. The analysis indicates that a model with at least three degrees of freedom (DOF) is needed to predict such configurations, as well as the various critical thresholds, with reasonable errors of around one percent when compared against FD. In so doing, the model can be used to provide static characterisation of the structure.

The Effect of Membrane Load on the Usage of Berger’s Model in Electrostatically Actuated Pre-Stressed Circular Curved Micro Plates

The effect of membrane load on the behaviour of axisymmetric bistable circular curved microplates on Berger’s based axisymmetric reduced order (RO) model, incorporating radial prestress, is studied. The model is first validated for a “mechanical” load, against a Föppl-von-Kármán’s RO model with twenty degrees of freedom (DOF), a finite differences (FD) solution and a finite elements (FE) model, serving as the reference. All solutions implement the “Riks” method to track possible unstable branches, which can swerve in due to the presence of higher buckling modes. A convergence study is carried out for the snap-through location and load, as well as for the critical elevation and prestress required for bistability. Based on validated results of the analysis, the reliability of the model for predicting the effect of prestress on the plate behaviour under nonlinear electrostatic load is then investigated while using FD solutions as the reference. The study furnishes a reliable expended RO model, which includes prestress on the as-fabricated curved plate. The resulting model can further be used to estimate the value of residual prestress, present in an electrostatically actuated curved plate, based on its response.

Subharmonic Resonance of Two Thirds Order of Electrostatically Actuated Bio-MEMS Circular Plates: Amplitude-Frequency Response

This paper deals with subharmonic resonance of two thirds order or electrostatically activated BioMEMS circular plates. Specifically, this paper investigates the frequency amplitude response of this resonance. The system consists of a clamped flexible circular plate above a parallel electrode situated at a distance, and under an AC voltage of frequency near three fourths of the natural frequency of the plate. The method of multiple scales is used to model the hard excitations in the system, hard excitations that are necessary to produce this secondary resonance. This work predicts the response, as well as the effects of parameters such as voltage and damping on the response. This paper predicts that the subharmonic resonance of two thirds order consists of a near zero steady state amplitude, and higher values steady state amplitudes consisting of a stable branch and an unstable branch, and a saddle-node bifurcation point. The predictions regarding the effects of voltage and damping on the response of the BioMEMS plate shows that as the voltage increases, the bifurcation point is shifted to lower frequencies and lower amplitudes, while as the damping increases the bifurcation point is shifted to lower frequencies and high amplitudes. Therefore, the increase of damping leads to a case in which it is harder to reach higher amplitude steady-state solutions since it requires large initial amplitudes of the plate.