lithium aluminosilicate
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scholarly journals Lithium aluminosilicate glass-ceramics for low-temperature anodic sealing of MEMS sensors

2021 ◽  
Vol 2086 (1) ◽  
pp. 012184
Author(s):  
R Kleimanov ◽  
I Komarevtsev ◽  
Y Enns ◽  
Y Akulshin ◽  
A Korshunov ◽  
...  
Keyword(s):  
Glass Ceramics ◽  
Optical Transmittance ◽  
Aluminosilicate Glass ◽  
Anodic Bonding ◽  
Mems Sensors ◽  
Transparent Glass ◽  
Lithium Aluminosilicate ◽  
Bonding Parameters ◽  
Hermetic Sealing ◽  
Atomic Cell

Abstract The results of a study of the anodic bonding parameters of transparent glass-ceramics based on lithium aluminosilicates which are promising as structural materials of MEMS and MOEMS sensors are presented. A comparison of the optical transmittance of these materials and classical for MEMS industry glasses has been carried out. The glass-ceramics electrical conductivity in a wide temperature range has been measured. The procedure of hermetic sealing of glass-ceramics by the anodic bonding at temperatures of 150 – 250 °C has been worked out. A prototype of glass-ceramic atomic cell has been fabricated.

scholarly journals A novel study of the effect of temperature on the crystal structure of lithium aluminosilicate materials

Open Ceramics ◽  
2021 ◽  
pp. 100169
Author(s):  
Rut Benavente ◽  
María Dolores Salvador ◽  
Adolfo Fernandez ◽  
Amparo Borrell
Keyword(s):  
Crystal Structure ◽  
Effect Of Temperature ◽  
Lithium Aluminosilicate

Wetting and joining of surface-oxidized SiC ceramic with calcium lithium aluminosilicate glass filler

2021 ◽  
pp. 150951
Author(s):  
Jian Fang ◽  
Liangbo Sun ◽  
Songsong Guo ◽  
Tipeng Shan ◽  
Yue Wen ◽  
...  
Keyword(s):  
Aluminosilicate Glass ◽  
Lithium Aluminosilicate ◽  
Sic Ceramic ◽  
Glass Filler

Composition-tuned lithium aluminosilicate as a new humidity-sensing ceramic material with high sensitivity

2021 ◽  
pp. 129928
Author(s):  
Sung-Geun Lee ◽  
Jung Yong Seo ◽  
Jin-Woong Lee ◽  
Woon Bae Park ◽  
Kee-Sun Sohn ◽  
...  
Keyword(s):  
Ceramic Material ◽  
High Sensitivity ◽  
Humidity Sensing ◽  
Lithium Aluminosilicate

Crystallization Behavior and Kinetics of Lithium Aluminosilicate Glasses with Various Li2O Contents

2021 ◽  
Vol 36 (2) ◽  
pp. 243-247
Author(s):  
Jianjun Han ◽  
Wei Hong ◽  
Hong Jiang ◽  
Jianxiong He ◽  
Qianchen Wang ◽  
...  
Keyword(s):  
Crystallization Behavior ◽  
Lithium Aluminosilicate ◽  
Aluminosilicate Glasses ◽  
Kinetics Of
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