dual ion beam sputtering
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Ultra-low stress high reflective film by dual-ion-beam sputtering deposition

2021 ◽  
Vol 61 (03) ◽  
Author(s):  
Jinlin Bai ◽  
Huasong Liu ◽  
Yugang Jiang ◽  
Lishuan Wang ◽  
Xiao Yang ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Sputtering Deposition ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Optical Spectra and Surface Morphologies of Near-Infrared Narrow Band-Pass Filters Using Dual Ion Beam Sputtering

2020 ◽  
Vol 40 (21) ◽  
pp. 2131001
Author(s):  
陈刚 Chen Gang ◽  
刘定权 Liu Dingquan ◽  
马冲 Ma Chong ◽  
王凯旋 Wang Kaixuan ◽  
张莉 Zhang Li ◽  
...  
Keyword(s):  
Near Infrared ◽  
Narrow Band ◽  
Ion Beam ◽  
Optical Spectra ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Band Pass ◽  
Dual Ion Beam Sputtering ◽  
Surface Morphologies

Deposition of thin tungsten carbide films by dual ion beam sputtering deposition

Vacuum ◽  
2018 ◽  
Vol 157 ◽  
pp. 45-50 ◽  
Author(s):  
Fei Zhu ◽  
Zhi-lei Chen ◽  
Ke-zhao Liu ◽  
Wei Liang ◽  
Zhengjun Zhang
Keyword(s):  
Tungsten Carbide ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Sputtering Deposition ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

scholarly journals Effects of Annealing on Residual Stress in Ta2O5 Films Deposited by Dual Ion Beam Sputtering

Coatings ◽  
2018 ◽  
Vol 8 (4) ◽  
pp. 150 ◽  
Author(s):  
Qipeng Lv ◽  
Mingliang Huang ◽  
Shaoqian Zhang ◽  
Songwen Deng ◽  
Faquan Gong ◽  
...  
Keyword(s):  
Residual Stress ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering
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