reactive gas
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Author(s):  
Masaya Morita ◽  
Keiji Ishibashi ◽  
Kenichiro Takahashi ◽  
Shigenori Ueda ◽  
Jun Chen ◽  
...  

Abstract The effects of reactive gas flow conditions on nonpolar AlN film growth on MnS/Si (100) substrates using reactive DC magnetron sputtering were investigated. During AlN deposition at a substrate temperature of 750 °C, the MnS surface can be unintentionally nitrided, resulting in a decrease in the crystallinity of the AlN. Low temperature growth of the AlN layer at 300 °C prevents this nitridation and results in the crystallization of nonpolar AlN. A N2 flow equal to 30% of the Ar sputtering gas flow was found to improve the crystallinity of the nonpolar AlN and to reduce nitrogen defects, which play an important role in interfacial reactions. Nitrogen defects promote the formation of alloys such as AlMn and MnSi that degrade the interface and can significantly decompose the MnS. A higher proportion of N2 improves the nonpolar AlN crystallinity, reduces the concentration of defects and suppresses reactions at the AlN/MnS interface.


Crystals ◽  
2022 ◽  
Vol 12 (1) ◽  
pp. 78
Author(s):  
Nguentra Sucheewa ◽  
Winadda Wongwiriyapan ◽  
Annop Klamchuen ◽  
Michiko Obata ◽  
Masatsugu Fujishige ◽  
...  

This study successfully demonstrated the tailoring properties of hafnium nitride (HfN) thin films via reactive gas-timing (RGT) RF magnetron sputtering for surface-enhanced Raman spectroscopy (SERS) substrate applications. The optimal RGT sputtering condition was investigated by varying the duration time of the argon and nitrogen gas sequence. The RGT technique formed thin films with a grain size of approximately 15 nm. Additionally, the atomic ratios of nitrogen and hafnium can be controlled between 0.24 and 0.28, which is greater than the conventional technique, resulting in a high absorbance in the long wavelength region. Moreover, the HfN thin film exhibited a high Raman signal intensity with an EF of 8.5 × 104 to methylene blue molecules and was capable of being reused five times. A superior performance of HfN as a SERS substrate can be attributed to its tailored grain size and chemical composition, which results in an increase in the hot spot effect. These results demonstrate that the RGT technique is a viable method for fabricating HfN thin films with controlled properties at room temperature, which makes them an attractive material for SERS and other plasmonic applications.


Energy ◽  
2021 ◽  
pp. 122974
Author(s):  
Zhanghao Wan ◽  
Shiliang Yang ◽  
Jianhang Hu ◽  
Guirong Bao ◽  
Hua Wang

2021 ◽  
Author(s):  
Preecha Kittikhunnatham ◽  
Gabrielle A. Leith ◽  
Abhijai Mathur ◽  
Jennifer K. Naglic ◽  
Corey R. Martin ◽  
...  
Keyword(s):  

Author(s):  
Preecha Kittikhunnatham ◽  
Gabrielle A. Leith ◽  
Abhijai Mathur ◽  
Jennifer K. Naglic ◽  
Corey R. Martin ◽  
...  
Keyword(s):  

2021 ◽  
Vol 2059 (1) ◽  
pp. 012021
Author(s):  
V I Shapovalov

Abstract In this work, we studied the effect of constant parameters of the sputtering system on the width of the hysteresis loop during reactive sputtering. The sticking coefficient of the reactive gas to the surface, the chamber pumping speed, the target area, etc. are taken as parameters. The comparative study was carried out by numerical solution of systems of algebraic equations describing the chemisorption and physicochemical models of metal target reactive sputtering in a single reactive gas. The calculations were performed for sputtering a tantalum target in an Ar + O2 mixture. The studied dependences were non-linear in all cases.


Energies ◽  
2021 ◽  
Vol 14 (19) ◽  
pp. 6233
Author(s):  
Alexey Kiverin ◽  
Ivan Yakovenko

Combustible aqueous foams and foamed emulsions represent prospective energy carriers. This paper is devoted to the overview of model assumptions required for numerical simulations of combustion and detonation processes in aqueous foams. The basic mathematical model is proposed and used for the analysis of the combustion development in the wet aqueous foam containing bubbles filled with reactive gas. The numerical results agree with the recent experimental data on combustion and detonation in aqueous foams containing premixed hydrogen–oxygen. The obtained results allowed for distinguishing the mechanisms of flame acceleration, transition to detonation, detonation propagation, and decay.


Author(s):  
Klaus Zimmer ◽  
Martin Ehrhardt ◽  
Pierre Lorenz ◽  
Xi Wang ◽  
Pingping Wang ◽  
...  

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