Design and evaluation of a micro resonator structure as a biosensor for droplet analysis with a standard fabrication method

Purpose In this work, the sensing and actuating elements are designed with interdigitated capacitors away from the sensitive element on which the droplet is placed. This pattern helps to prevent interference of electrical elements with the droplet. Choosing shear resonance mode at this proposed structure minimizes the damping effect of droplet touch by the resonator structure. The glass-based standard fabrication method of the proposed biosensor is presented exactly. Design/methodology/approach Mechanical resonator sensors are extremely limited because of the high damping factor and the high electrical conductivity in the aqueous environment. In this work, a molecule detector biosensor is proposed for droplet analysis, which is possible to fabricate using micro-electro-mechanical systems (MEMS) technology. By electromechanical coupling of resonators as a mechanical resonator structure, a standing mechanical wave is formed at this structure by electrostatic actuating elements. Findings In this paper, a mechanical resonator structure as a biosensor is proposed for micro-droplet analysis that can be fabricated by MEMS technology. It is designed at a lower cost fabrication method using electrostatic technology and interdigitated capacitors. The response of the biosensor displacement frequency at the resonance frequency of the desired mode is reasonable for measuring the capacitive changes of its output. The mass sensitivity of the proposed biosensor is in the range of 1 ng, and it has a large sensitive area for capturing target molecules. Originality/value To evaluate the quality of the proposed design, the stimulated analysis is conducted by COMSOL and results are presented.

Phononic Crystal Sensors: A New Class of Resonant Sensors—Chances and Challenges for the Determination of Liquid Properties

Resonant mechanical sensors are often considered as mass balance, which responds to an analyte adsorbed on or absorbed in a thin sensitive (and selective) layer deposited on the surface of the resonant device. In a more general sense, the sensor measures properties at the interface of the mechanical resonator to the medium under inspection. A phononic crystal (PnC) sensor employs mechanical resonance as well; however, the working principle is fundamentally different. The liquid medium under inspection becomes an integral part of the PnC sensor. The liquid-filled compartment acts as a mechanical resonator. Therefore, the sensor probes the entire liquid volume within this compartment. In both sensor concepts, the primary sensor value is a resonant frequency. To become an attractive new sensing concept, specifically as a bio and chemical sensor, the PnC sensor must reach an extraordinary sensitivity. We pay attention to the liquid viscosity, which is an important factor limiting sensitivity. The main part of our analysis has been performed on 1D PnC sensors, since they underlie the same material-related acoustic dissipation mechanisms as 2D and 3D PnC sensors. We show that an optimal relation of frequency shift to bandwidth and amplitude of resonance is the key to an enhanced sensitivity of the sensor-to-liquid analyte properties. We finally address additional challenges of 2D and 3D PnC sensor design concept. We conclude that the sensor should seek for a frequency resolution close to 10−6 the probing frequency, or a resolution with speed of sound approaching 1 mm s−1, taking water-based analytes as an example.