Electron-Beam Synthesis of Dielectric Coatings Using Forevacuum Plasma Electron Sources (Review)

This is a review of current developments in the field of ion-plasma and beam methods of synthesis of protective and functional dielectric coatings. We give rationales for attractiveness and prospects of creating such coatings by electron-beam heating and following evaporation of dielectric targets. Forevacuum plasma electron sources, operating at elevated pressure values from units to hundreds of pascals, make it possible to exert the direct action of an electron beam on low-conductive materials. Electron-beam evaporation of aluminum oxide, boron, and silicon carbide targets is used to exemplify the particular features of electron-beam synthesis of such coatings and their parameters and characteristics.

Influence of electron-beam heating modes on the structure of composite ZrO2-Al2O3 ceramics

The article presents the results of electron beam sintering of composite ceramics based on Al2O3 and ZrO2 powders. Samples were made with different contents of Al2O3 and ZrO2 components and different pressing pressures. Sintering was carried out in vacuum at a helium pressure of 30 Pa. An electron beam generated by a forevacuum plasma electron source was used for sintering. It is shown that the sintering result depends on the pressing pressure and the percentage of components. The influence of the geometry of the samples and their composition on the temperature drop over their volume during sintering has been determined.