Techniques in the Design of Thermomechanical Microactuators

MEMS/NEMS ◽

10.1007/0-387-25786-1_31 ◽

2007 ◽

pp. 1177-1190 ◽

Cited By ~ 1

Author(s):

Larry L. Howell ◽

Timothy W. McLain ◽

Michael S. Baker ◽

Christian D. Lott

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