MEMS/NEMS
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Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Micromachined Thermal Accelerometer without Proof Mass

MEMS/NEMS ◽  
2007 ◽  
pp. 1023-1054 ◽  
Author(s):  
F. Mailly ◽  
A. Giani ◽  
A. Boyer
Keyword(s):  
Proof Mass

Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications

MEMS/NEMS ◽  
2007 ◽  
pp. 1429-1471 ◽  
Author(s):  
Huikai Xie ◽  
Shane Todd ◽  
Ankur Jain ◽  
Gary K. Fedder
Keyword(s):  
Single Crystal ◽  
Biomedical Imaging ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Silicon Based

MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives

MEMS/NEMS ◽  
2007 ◽  
pp. 993-1022
Author(s):  
Roberto Oboe ◽  
Ernesto Lasalandra ◽  
Matthew T. White
Keyword(s):  
Vibration Suppression ◽  
Hard Disk Drives ◽  
Hard Disk ◽  
Disk Drives

scholarly journals Techniques in the Design of Thermomechanical Microactuators

MEMS/NEMS ◽  
2007 ◽  
pp. 1177-1190 ◽  
Author(s):  
Larry L. Howell ◽  
Timothy W. McLain ◽  
Michael S. Baker ◽  
Christian D. Lott

Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and Ceramic Microdevices

MEMS/NEMS ◽  
2007 ◽  
pp. 801-869 ◽  
Author(s):  
T. Hanemann ◽  
W. Bauer ◽  
R. Knitter ◽  
P. Woias
Keyword(s):  
Rapid Prototyping ◽  
Rapid Tooling ◽  
Polymer Metal

Techniques in the Development of Endovascular Microtools & Their Applications

MEMS/NEMS ◽  
2007 ◽  
pp. 1472-1507
Author(s):  
Seok Chung ◽  
Junha Park ◽  
Dong-Chul Han ◽  
Jun-Keun Chang

A Hierarchical Design Platform for Microelectrofluidic Systems (MEFS)

MEMS/NEMS ◽  
2007 ◽  
pp. 197-234
Author(s):  
Tianhao Zhang ◽  
Krishnendu Chakrabarty ◽  
Richard B. Fair
Keyword(s):  
Hierarchical Design

Injection Molding Techniques for the Fabrication of MEMS Elements

MEMS/NEMS ◽  
2007 ◽  
pp. 870-879
Author(s):  
Masayuki Nakao ◽  
Chin Yan ◽  
Makoto Yoda
Keyword(s):  
Injection Molding
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