HR-STEM EELS analysis of silicon 32 nm technology using a TITAN with a probe Cs corrector

EMC 2008 14th European Microscopy Congress 1–5 September 2008, Aachen, Germany ◽

10.1007/978-3-540-85226-1_17 ◽

2008 ◽

pp. 33-34

Author(s):

R. Pantel ◽

J. L Rouvière ◽

E. Gautier ◽

S. Denorme ◽

C. Fenouiller-Beranger ◽

...

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