Simulations of Ge and C Implantations to Form Si1-χGeχ BJT

Springer Proceedings in Physics - Amorphous and Crystalline Silicon Carbide IV ◽

10.1007/978-3-642-84804-9_54 ◽

1992 ◽

pp. 368-373

Author(s):

A. Gupta ◽

J. W. Waters ◽

M. M. Rahman ◽

C. Y. Yang

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