Sealing of Surface Micromachined Poly-SiGe Cavities

Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics ◽

10.1007/978-94-007-6799-7_5 ◽

2013 ◽

pp. 101-126

Author(s):

Pilar González Ruiz ◽

Kristin De Meyer ◽

Ann Witvrouw

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