Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics
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9789400767980, 9789400767997

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CMOS Integrated Poly-SiGe Piezoresistive Pressure Sensor

Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics ◽

10.1007/978-94-007-6799-7_7 ◽

2013 ◽

pp. 149-174

Author(s):

Pilar González Ruiz ◽

Kristin De Meyer ◽

Ann Witvrouw

Keyword(s):

Pressure Sensor ◽

Piezoresistive Pressure Sensor

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The Pressure Sensor Fabrication Process

Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics ◽

10.1007/978-94-007-6799-7_4 ◽

2013 ◽

pp. 75-99

Author(s):

Pilar González Ruiz ◽

Kristin De Meyer ◽

Ann Witvrouw

Keyword(s):

Pressure Sensor ◽

Fabrication Process ◽

Sensor Fabrication

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Characterization of Poly-SiGe Pressure Sensors

Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics ◽

10.1007/978-94-007-6799-7_6 ◽

2013 ◽

pp. 127-148

Author(s):

Pilar González Ruiz ◽

Kristin De Meyer ◽

Ann Witvrouw

Keyword(s):

Pressure Sensors

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Poly-SiGe as Piezoresistive Material

Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics ◽

10.1007/978-94-007-6799-7_2 ◽

2013 ◽

pp. 25-49

Author(s):

Pilar González Ruiz ◽

Kristin De Meyer ◽

Ann Witvrouw

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Introduction

Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics ◽

10.1007/978-94-007-6799-7_1 ◽

2013 ◽

pp. 1-23

Author(s):

Pilar González Ruiz ◽

Kristin De Meyer ◽

Ann Witvrouw

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Conclusions and Future Work

Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics ◽

10.1007/978-94-007-6799-7_8 ◽

2013 ◽

pp. 175-180

Author(s):

Pilar González Ruiz ◽

Kristin De Meyer ◽

Ann Witvrouw

Keyword(s):

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Sealing of Surface Micromachined Poly-SiGe Cavities

Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics ◽

10.1007/978-94-007-6799-7_5 ◽

2013 ◽

pp. 101-126

Author(s):

Pilar González Ruiz ◽

Kristin De Meyer ◽

Ann Witvrouw

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Design of a Poly-SiGe Piezoresistive Pressure Sensor

Poly-SiGe for MEMS-above-CMOS Sensors - Springer Series in Advanced Microelectronics ◽

10.1007/978-94-007-6799-7_3 ◽

2013 ◽

pp. 51-73

Author(s):

Pilar González Ruiz ◽

Kristin De Meyer ◽

Ann Witvrouw

Keyword(s):

Pressure Sensor ◽

Piezoresistive Pressure Sensor

Download Full-text