Effect of Overlayer Thickness on the Nanoindentation of SiO2 /Si

Forces in Scanning Probe Methods ◽

10.1007/978-94-011-0049-6_7 ◽

1995 ◽

pp. 85-90 ◽

Author(s):

Charles F. Draper ◽

David M. Schaefer ◽

Richard J. Colton ◽

Steven M. Hues

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